Proceedings of the 2013 International Symposium on Nonlinear Theory and its Applications
2013
Session Number:C4L-D
Session:
Number:499
Multiscale Surface Roughness Measure for Dressed-Photon-Phonon Etching
Makoto Naruse, Takashi Yatsui, Wataru Nomura, Tadashi Kawazoe, Masaki Aida, Motoichi Ohtsu,
pp.499-502
Publication Date:
Online ISSN:2188-5079
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