Summary
International Symposium on Nonlinear Theory and its Applications
2009
Session Number:B4L-C
Session:
Number:B4L-C4
Investigation of Nonlinearity in Coupled MEMS Gyroscopes
Suketu NAIK, Takashi HIKIHARA,
pp.-
Publication Date:2009/10/18
Online ISSN:2188-5079
Summary:
A gyroscope can measure the rotational force, known as the Coriolis force, applied orthogonally to the plane of motion. In the presence of this force, the gyroscope produces a change in acceleration in drive mode which in turn causes motion in sense mode. This motion can be converted into angular rate and the input force can be estimated. Such angular rate sensors can be coupled to enhance their sensitivities by allowing them to act as a system of sensors. To help understand the dynamics underlying the coupled system, prototype devices have been fabricated in an open-ended coupling scheme in PolyMUMPs process. In this research, dynamics of these particular devices are targeted. Furthermore, the global behavior of the coupled system is being investigated in various regimes of operation.