Electronics-Component Parts and Materials(Date:2004/11/04)

Presentation
表紙

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[Date]2004/11/4
[Paper #]
目次

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[Date]2004/11/4
[Paper #]
Low temperature growth of (110)-orientated SiC films by triode plasma CVD method

Ryuichi TSURUMA,  Kantarou MORIMOTO,  Yuzuru NARITA,  Kanji YASUI,  Tadashi AKAHANE,  

[Date]2004/11/4
[Paper #]CPM2004-127
Heteroepitaxial growih of GaN and InN on a c-SiC/Si(111) templates formed by C^+-ion implantation into Si(111)

Takahiro Kobayashi,  Akihiro Hashimoto,  Akio Yamamoto,  

[Date]2004/11/4
[Paper #]CPM2004-128
Field emission characteristics of carbon nanotube copper composite electrode

Yosuke HASEGAWA,  Yuto INAGAKI,  Takaaki SUZAWA,  Yosuke MAEZAWA,  Rinpei HAYASHIBE,  Katsuya ABE,  Kiichi KAMIMURA,  Susumu ARAI,  Morinobu ENDO,  

[Date]2004/11/4
[Paper #]CPM2004-129
Characteristic of Thin VN Barrier in Cu/VN/SiOC/Si System

Mayumi B. TAKEYAMA,  Genta MIZUNO,  Yoshie WAKABAYASHI,  Atsushi NOYA,  

[Date]2004/11/4
[Paper #]CPM2004-130
Growth of preferentially oriented Cu(111) layer on randomly oriented ZrN barrier in Cu/ZrN/Si contact

Masaru SATOH,  Mayumi B. TAKEYAMA,  Atsushi NOYA,  

[Date]2004/11/4
[Paper #]CPM2004-131
Preparation and annealing effect of Cu-Al-O films by the facing targets spattering method

Junya OGATA,  Yuji ITOH,  Nozomu TUBOI,  Satoshi KOBAYASHI,  Hidehiko SHIMIZU,  Keizou KATOH,  Futao KANEKO,  

[Date]2004/11/4
[Paper #]CPM2004-132
Investigation of High Rate Sputtering Method for the Deposition of TiO_2 Films

Tomoki TAKAHASHI,  Yoichi HOSHI,  Shigetoshi KAWAGUCHI,  Eisuke SUZUKI,  Osamu KAMIYA,  

[Date]2004/11/4
[Paper #]CPM2004-133
Resist-removal technique without plasma using hydrogen atoms generated on heated catalyzer

Atsushi MASUDA,  Kouhei HASHIMOTO,  Kazuhisa TAKAO,  Tomoatsu ISHIBASHI,  Hideki MATSUMURA,  

[Date]2004/11/4
[Paper #]CPM2004-134
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[Date]2004/11/4
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[Date]2004/11/4
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