Presentation | 2004/11/4 Preparation and annealing effect of Cu-Al-O films by the facing targets spattering method Junya OGATA, Yuji ITOH, Nozomu TUBOI, Satoshi KOBAYASHI, Hidehiko SHIMIZU, Keizou KATOH, Futao KANEKO, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Cu-Al-O films were deposited at 700℃ by using dc-reactive sputtering with Cu and Al elemental targets under Ar-diluted oxygen gas (O_2: 5~20%) atmosphere, and then annealed at 1050℃ in nitrogen atmosphere. Regardless of the gas ratio of O_2 to Ar, the molar fraction of oxygen in as-deposited films was around 0.6. All as-deposited films exhibited XRD lines of CuAl_2O_4 and CuO. The annealing process caused the molar fraction of oxygen to approach 0.5, resulting in disappearance of the CuAl_2O_4 XRD lines. The annealed films with [Cu]/[Al]~1, exhibiting intense CuAlO_2 XRD lines and the weak CuO XRD line, had the absorption edge corresponding to the energy gap of CuAlO_2 and p-type conductivity. This indicates that the annealed films with [Cu]/[Al]-1 are dominated by CuAlO_2 phase. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | CuAlO_2 films / delafossite structure / reactive spattering / transparent conducting oxide |
Paper # | CPM2004-132 |
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Committee | CPM |
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Conference Date | 2004/11/4(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Component Parts and Materials (CPM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Preparation and annealing effect of Cu-Al-O films by the facing targets spattering method |
Sub Title (in English) | |
Keyword(1) | CuAlO_2 films |
Keyword(2) | delafossite structure |
Keyword(3) | reactive spattering |
Keyword(4) | transparent conducting oxide |
1st Author's Name | Junya OGATA |
1st Author's Affiliation | Graduate School of Science and Technology, Niigata University() |
2nd Author's Name | Yuji ITOH |
2nd Author's Affiliation | Graduate School of Science and Technology, Niigata University |
3rd Author's Name | Nozomu TUBOI |
3rd Author's Affiliation | Center for Transdisciplinaty Research, Niigata University:Faculty of Engineering, Niigata University |
4th Author's Name | Satoshi KOBAYASHI |
4th Author's Affiliation | Faculty of Engineering, Niigata University |
5th Author's Name | Hidehiko SHIMIZU |
5th Author's Affiliation | Center for Transdisciplinaty Research, Niigata University:Faculty of Engineering, Niigata University |
6th Author's Name | Keizou KATOH |
6th Author's Affiliation | Center for Transdisciplinaty Research, Niigata University:Graduate School of Science and Technology, Niigata University |
7th Author's Name | Futao KANEKO |
7th Author's Affiliation | Center for Transdisciplinaty Research, Niigata University:Faculty of Engineering, Niigata University |
Date | 2004/11/4 |
Paper # | CPM2004-132 |
Volume (vol) | vol.104 |
Number (no) | 425 |
Page | pp.pp.- |
#Pages | 5 |
Date of Issue |