| Presentation | 2004/11/4 Preparation and annealing effect of Cu-Al-O films by the facing targets spattering method Junya OGATA, Yuji ITOH, Nozomu TUBOI, Satoshi KOBAYASHI, Hidehiko SHIMIZU, Keizou KATOH, Futao KANEKO, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Cu-Al-O films were deposited at 700℃ by using dc-reactive sputtering with Cu and Al elemental targets under Ar-diluted oxygen gas (O_2: 5～20%) atmosphere, and then annealed at 1050℃ in nitrogen atmosphere. Regardless of the gas ratio of O_2 to Ar, the molar fraction of oxygen in as-deposited films was around 0.6. All as-deposited films exhibited XRD lines of CuAl_2O_4 and CuO. The annealing process caused the molar fraction of oxygen to approach 0.5, resulting in disappearance of the CuAl_2O_4 XRD lines. The annealed films with [Cu]/[Al]～1, exhibiting intense CuAlO_2 XRD lines and the weak CuO XRD line, had the absorption edge corresponding to the energy gap of CuAlO_2 and p-type conductivity. This indicates that the annealed films with [Cu]/[Al]-1 are dominated by CuAlO_2 phase. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | CuAlO_2 films / delafossite structure / reactive spattering / transparent conducting oxide |
| Paper # | CPM2004-132 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2004/11/4(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Preparation and annealing effect of Cu-Al-O films by the facing targets spattering method |
| Sub Title (in English) | |
| Keyword(1) | CuAlO_2 films |
| Keyword(2) | delafossite structure |
| Keyword(3) | reactive spattering |
| Keyword(4) | transparent conducting oxide |
| 1st Author's Name | Junya OGATA |
| 1st Author's Affiliation | Graduate School of Science and Technology, Niigata University() |
| 2nd Author's Name | Yuji ITOH |
| 2nd Author's Affiliation | Graduate School of Science and Technology, Niigata University |
| 3rd Author's Name | Nozomu TUBOI |
| 3rd Author's Affiliation | Center for Transdisciplinaty Research, Niigata University:Faculty of Engineering, Niigata University |
| 4th Author's Name | Satoshi KOBAYASHI |
| 4th Author's Affiliation | Faculty of Engineering, Niigata University |
| 5th Author's Name | Hidehiko SHIMIZU |
| 5th Author's Affiliation | Center for Transdisciplinaty Research, Niigata University:Faculty of Engineering, Niigata University |
| 6th Author's Name | Keizou KATOH |
| 6th Author's Affiliation | Center for Transdisciplinaty Research, Niigata University:Graduate School of Science and Technology, Niigata University |
| 7th Author's Name | Futao KANEKO |
| 7th Author's Affiliation | Center for Transdisciplinaty Research, Niigata University:Faculty of Engineering, Niigata University |
| Date | 2004/11/4 |
| Paper # | CPM2004-132 |
| Volume (vol) | vol.104 |
| Number (no) | 425 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |