Electronics-Silicon Devices and Materials(Date:1999/07/23)

Presentation
Production-Worthy Full Process Integration of Ta_2O_5 Capacitor Technology

Chan Kim,  Ki-Seon Park,  Kyong-Min Kim,  Min-Soo Kim,  Sang-Kyoo Lee,  Yo-Hwan Koh,  Chung-Tae Kim,  Nam-Jin Bae,  Sang-Ho Kim,  

[Date]1999/7/23
[Paper #]SDM99-105
Challenge to 0.13μm Device Patterning using KrF

In-Sung Kim,  Jung-Hyeon Lee,  Joon-Soo Par,  Dong-Ho Cha,  Han-Ku Cho,  Joo-Tae Moon,  Sang-In Lee,  

[Date]1999/7/23
[Paper #]SDM99-106
GaAs RF IC with On-Chip High-k Capacitor

Daisuke Ueda,  

[Date]1999/7/23
[Paper #]SDM99-107
Bottom Electrode Structures of Pt/Ru Deposited on Polycrystalline Silicon for Semiconductor Memory Capacitors

Eun-Suck Choi,  Jun-Sik Hwang,  Jong-Bong Park,  Soon-Gil Yoon,  

[Date]1999/7/23
[Paper #]SDM99-108
Deposition and Characterization of Ru Thin Films Prepared by Metallorganic Chemical Vapor Deposition

Sang Yeol Kang,  Kook Hyun Choi,  Seok Kiu Lee,  Cheol Seong Hwang,  Hyeong Joon Kim,  

[Date]1999/7/23
[Paper #]SDM99-109
Integration of Split Word Line Ferroelectric Memories Using Etch Stopping Layers and Multi-Layer Etching Technology

Hyo-Jin Nam,  Seong-Moon Cho,  William Jo,  Heon-Min Lee,  Dong-Chun Kim,  Hee-Bok Kang,  Ki-Young Oh,  

[Date]1999/7/23
[Paper #]SDM99-110
Properties of MFSFET's with Various Gate Electrodes Using LiNbO_3/Si (100) Structures

Kwang-Ho Kim,  Soon-Won Jung,  Chae-Gyu Kim,  Byoung-Gon Yu,  Won-Jae Lee,  

[Date]1999/7/23
[Paper #]SDM99-111
A Non-destructive Readout Single Transistor FRAM with Floating Well structures

Shi-Ho Kim,  Won Jae Lee,  In-kyu You,  Byoung Gon Yu,  

[Date]1999/7/23
[Paper #]SDM99-112
The Etching Behaviors of Pt/SrBi_2Ta_2O_9/NO/Si Structure for MFIS in NDRO-Type FRAM

Won-Jae Lee,  Chae-Ryung Cho,  Shi-Ho Kim,  In-Kyu You,  Bo Woo Kim,  Byoung-Gon Yu,  Chang-Ho Shin,  Hee-Chul Lee,  

[Date]1999/7/23
[Paper #]SDM99-113
Stress in Inter-level Dielectric Oxides on Integrated SBT-based Ferroelectric Memories

Suk-Kyoung Hong,  Yong Ku Baek,  B Yang,  Young Min Kang,  Chang Goo Lee,  Chung Won Suh,  Nam Soo Kang,  

[Date]1999/7/23
[Paper #]SDM99-114
Hydrogen-Induced Degradation of Oxygen Plasma Treated Ferroelectric Pb (Zr,Ti) O_3 Capacitor

Youngsoo Par,  June Key Lee,  Ilsub Chung,  

[Date]1999/7/23
[Paper #]SDM99-115
Dependence of Switching Characteristics on Fabrication Process and Capacitor Size for Pt/SBT/Pt Ferroelectric Capacitor

Woo Seok Yang,  Seung Jin Yeom,  Nam Kyeng Kim,  Yong Sik Yu,  Shang Kyoo Lee,  Chung Tae Kim,  

[Date]1999/7/23
[Paper #]SDM99-116
ASET Activities on the Semiconductor Research 1999

Hideo Setoya,  

[Date]1999/7/23
[Paper #]SDM99-117
Future Semiconductor Technology & System IC 2010

Youn June Park,  Man Young Sung,  Se Geun Park,  Jae Seok Kim,  

[Date]1999/7/23
[Paper #]SDM99-118
[OTHERS]

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[Date]1999/7/23
[Paper #]
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