Summary
International Technical Conference on Circuits/Systems, Computers and Communications
2008
Session Number:P1
Session:
Number:P1-37
Fabrication of Drug Delivery System with Piezoelectric Micropump for Neural Probe
Sewan Park, Hyeon Cheol Kim, Kukjin Chun,
pp.-
Publication Date:2008/7/7
Online ISSN:2188-5079
Summary:
This paper describes a microelectromechanical systems (MEMS) micromachined drug delivery system with micropump and microchannel for neural probe capable of selectively delivering chemicals as well as electrically recording. The neural probe is developed to support research in neurophysiology. For the realization of chemical stimulating at controlled release rate, the micropump and fluidic microchannel are integrated. The micropump is a peristaltic type with diffuser/nozzle elements actuated by the piezoelectric force. The process for the neural probe are performed with one silicon wafer. The structure of neural probe, microchannel and chamber of micropump are defined by silicon deep etch process. The membrane of micropump and dielectric passivation layer is fabricated by polydimethylsiloxane (PDMS).