Summary
International Symposium on Antennas and Propagation
2008
Session Number:4B11
Session:
Number:4B11-2
Electromagnetic Modeling and Analysis of 2D Comb Structured MEMS Capacitor with Accelerated Motion
Shafrida Sahrani, Michiko Kuroda,
pp.-
Publication Date:2008/10/27
Online ISSN:2188-5079
Summary:
The applications in RF MEMS especially for wireless and microwave devices have seen an amazing growth in the past 10 years. The nature of RF MEMS technology and its diversity of useful applications make it potentially a far more pervasive technology than even integrated circuits microchips. As compared to the semiconductors switches, PIN diode and FET, RF MEMS have many excellent advantages such as high isolation, high bandwidth and low power consumption [1], [2], [3]. Ever since RF MEMS technology is still new in these decades, the numerical and dynamic analysis of RF MEMS components seems to be critical issues that need to be solved immediately. To solve this problem, an improved and efficient knowledge of the electromagnetic field distribution around a moving or rotating body is required. But due to the limitations of the conventional numerical techniques for the time changing boundaries, it is computationally tedious and time consuming to solve these problems numerically for the electromagnetic fields. In this paper, an efficient numerical approach, which is a combination of FDTD method [4] and the body-fitted grid generation method with moving boundaries [5], is presented for the analysis of 2D comb structured MEMS variable capacitors with accelerated motions.These comb structured variable capacitors consists of two plates, which is the static plate and the movable plate that suspended with the spring. By using this numerical technique, it is possible to analyze the combined effect of the mechanical and electrical forces. The relation of the acceleration of the plate and the bias voltage are derived and the theoretical and the numerical results are agreed very well. The relation between the oscillations of the frequency with the acceleration is also shown.