Summary
URSI Commission B 2013 International Symposium on Electromagnetic Theory EMTS 2013
2013
Session Number:23PM1P
Session:
Number:23PM1P-19
Efficient Modelling of an RF MEMS Capacitive Shunt Switch with Artificial Neural Networks
Taeyoung Kim, Zlatica Marinković, Vera Marković, Marija Milijić, Olivera Pronić-Rančić, Larissa Vietzorreck,
pp.550-553
Publication Date:2013/5/20
Online ISSN:2188-5079
DOI:10.34385/proc.30.23PM1P-19
Summary:
In this paper an efficient way of modelling an RF MEMS switch will be demonstrated. On the base of several fullwave numerical simulations of a switch, artificial neural networks (ANNs) are established to relate different input and output parameters of a switch. The good coincidence between the simulated data and the model is shown at the example of a capacitive shunt switch in coplanar technology. S-parameters of the switch or the resonant frequency are computed with high accuracy for different geometrical parameters, with the same data also the inverse problem of determining the required geometry for a given resonance is solved.