Summary
Optoelectronics and Communications Conference/International Conference on Integrated Optics and Optical Fiber Communication
2007
Session Number:12P
Session:
Number:12P-25
Low-Cost Undercut-Etching-Active-Region Method to Fabricate Laterally Tapered Active Waveguide for Electroabsorption Modulator and Spot-Size Converters Integratio
F. Z. Lin, S. A. Tsai, T. H. Wu, J. S. You, Y. J. Chiu,
pp.502-503
Publication Date:2007/7/9
Online ISSN:2188-5079
Summary:
A simple, low cost and all-wet-etching process was proposed to fabricate electroabsorption modulator (EAM) integrated with spot-size converters (SSCs). The laterally tapered active waveguide in the SSC region was formed by selectively undercut-wet- etching. Over 20dB/volt modulation efficiency as well as -16dB fiber-to-fiber insertion loss (w/o anti-reflection coating) and 11GHz of -3dB bandwidth in EAM performance was obtained.