Summary
Optoelectronics and Communications Conference/International Conference on Integrated Optics and Optical Fiber Communication
2007
Session Number:12E2
Session:
Number:12E2-4
Fabrication of Si wire optical waveguides by clad formation by selective oxidation of Si
Koichi Iiyama, Satoshi Asai, Masahiro Wakashima,
pp.434-435
Publication Date:2007/7/9
Online ISSN:2188-5079
Summary:
Si wire waveguides are fabricated by forming clad by selective oxidation of Si. Multimode waveguides are fabricated and the propagation loss is decreased as compared to the conventional fabrication process.