Summary
2023
Session Number:D2L-3
Session:
Number:D2L-34
Application of THz-Time Domain Spectroscopy to the Evaluation of Thin Films
Locquet Alexandre, Zhai Min, Shi Haolian, Citrin David,
pp.715-715
Publication Date:2023-09-21
Online ISSN:2188-5079
Summary:
We present applications of terahertz time-domain spectroscopy for the nondestructive evaluation of thin films. We combine physical properties of the interaction between THz waves and materials with signal and imaging processing. We illustrate with the evaluation of mill scale on steel, of conformal coatings on integrated circuits, and of multi-layer paint on a variety of substrates.