Electronics-Silicon Devices and Materials(Date:2003/10/14)

Presentation
表紙

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[Date]2003/10/14
[Paper #]
目次

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[Date]2003/10/14
[Paper #]
Large-Scale Electronic Structure Calculations as investigated by Accelerated Quantum Chemical Molecular Dynamics Method

Yumiko SASAKI,  Shouko UCHIDA,  Keiko CHIBA,  Risa ENDOU,  Kentaro SUGAWARA,  Asako CHIDA,  Jun MATSUURA,  Hideaki IGA,  Naoyuki ISODA,  Katsumi SASATA,  Toshiyuki YOKOSUKA,  Akira ENDOU,  Momoji KUBO,  Akira IMAMURA,  Akira MIYAMOTO,  

[Date]2003/10/14
[Paper #]SDM2003-169
A Hydrogen Termination Process on Silicon Surface as investigated by Computational Chemistry

Hideki IGA,  Keiko CHIBA,  Shouko UCHIDA,  Yumiko SASAKI,  Risa ENDOU,  Kentaro SUGAWARA,  MATSUURA Jun /,  Naoyuki ISODA,  Katsumi SASATA,  Toshiyuki YOKOSUKA,  Akira ENDOU,  Momoji KUBO,  Akira IMAMURA,  Keiichi NII,  Akinobu TERAMOTO,  Tadahiro OHMI,  Akira MIYAMOTO,  

[Date]2003/10/14
[Paper #]SDM2003-170
The effect of chemical contamination on device manufacturing process of next generation

Shoko ITO,  Makiko TAMAOKI,  Ayako SHIMAZAKI,  Shinji MORI,  Kazuo SAKI,  Soichi NADAHARA,  

[Date]2003/10/14
[Paper #]SDM2003-171
Limitation of aqueous cleaning for high-aspect-ratio, fine structures and their pattern-destruction-free cleaning technologies

koichiro SAGA,  Hitoshi KUNIYASU,  Takeshi HATTORI,  

[Date]2003/10/14
[Paper #]SDM2003-172
Flattening of Silicon(11O) surface

Hiroshi AKAHORI,  Keiichi NII,  Akinobu TERAMOTO,  Masaki HIRAYAMA,  Tadahiro OHMI,  

[Date]2003/10/14
[Paper #]SDM2003-173
Electrical Characteristics of MOSFET on Flattened (110) oriented Si substrate

Tatsufumi HAMADA,  Hiroshi AKAHORI,  keiichi NII,  Tomoyuki SUWA,  Masaki HIRAYAMA,  Akinobu TERAMOTO,  Tadahiro OHMI,  

[Date]2003/10/14
[Paper #]SDM2003-174
Electrical Characteristics of sub-100 nm CMOS on (110) surface Si substrate

Hidetatsu NAKAMURA,  Tatsuya EZAKI,  Toshiyuki IWAMOTO,  Mitsuhiro TOGO,  Takeo IKEZAWA,  Nobuyuki IKARASHI,  Masami HANE,  Toyoji YAMAMOTO,  

[Date]2003/10/14
[Paper #]SDM2003-175
Development of Accelerated Quantum Chemical Molecular Dynamics Method for the Dynamics Calculations under the Electric Fields and Its Application

Momoji KUBO,  Naoyuki ISODA,  Katusmi SASATA,  Hitoshi KUROKAWA,  akira EONDOU,  Akira IMAMURA,  Akira MIYAMOTO,  

[Date]2003/10/14
[Paper #]SDM2003-176
Computational Studies of Low Energy Boron Implantation on Silicon Surface

Katsumi SASATA,  Akira ENDOU,  Momoji KUBO,  Akira IMAMURA,  Hidehiko YABUHARA,  Masaaki KANOH,  Akira MIYAMOTO,  

[Date]2003/10/14
[Paper #]SDM2003-177
The Effects of Dopants towards the Stability of MgO Protective Layer for Plasma Display Panel

Risa ENDOU,  Syouko UCHIDA,  Yumiko SASAKI,  Keiko CHIBA,  Kentaro SUGAWARA,  Asako CHIDA,  Jun MATSUURA,  Naoyuki ISODA,  Katsumi SASATA,  Akira ENDOU,  Momoji KUBO,  Akira MIYAMOTO,  

[Date]2003/10/14
[Paper #]SDM2003-178
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[Date]2003/10/14
[Paper #]
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[Date]2003/10/14
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