Electronics-Silicon Devices and Materials(Date:2000/11/23)

Presentation
表紙

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[Date]2000/11/23
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目次

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[Date]2000/11/23
[Paper #]
[CATALOG]

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[Date]2000/11/23
[Paper #]
X-ray mask delineation performances by advanced EB writer EB-X3

M. Ezaki,  Y. Nakayama,  Y. Kikuchi,  S. Tsuboi,  H. Watanabe,  H. Aoyama,  Y. Matsui,  S. Ohki,  T. Morosawa,  S. Takahashi,  M. Oda,  

[Date]2000/11/23
[Paper #]SDM2000-158
Line Edge Roughness of Resist Pattern in Electron Beam Lithography

Masaki Yoshizawa,  Shigeru Moriya,  

[Date]2000/11/23
[Paper #]SDM2000-159
A70 nm high performance CMOS Technology with 1.0 V operation

A. Ono,  K. Fukasaku,  T. Mastuda,  T. Fukai,  N. Ikezawa,  K. Imai,  T. Horiuchi,  

[Date]2000/11/23
[Paper #]SDM2000-160
Low Resistivity TaNx/Ta/TaNx Metal Gate FDSOI-CMOS Technology Featuring Low-Temperature Processing

Hiroyuki Shimada,  Ichiro Ohshima,  Shinichi Nakao,  Munekatsu Nakagawa,  Shigetoshi Sugawa,  Tadahiro Ohmi,  

[Date]2000/11/23
[Paper #]SDM2000-161
Influence of nitrogen incorporation into ultrathin gate oxide for NBTI

N. Kimizuka,  K. Imai,  T. Iizuka,  C.T. Liu,  R.C. Keller,  T. Horiuchi,  

[Date]2000/11/23
[Paper #]SDM2000-162
Two Dimensional Effect on The V_ Fluctuation of Intrinsic-Body SOI-MOSFET

Risho Koh,  Kiyoshi Takeuchi,  Hisashi Takemura,  Tohru Mogami,  

[Date]2000/11/23
[Paper #]SDM2000-163
Impact of 0.18μm SOI CMOS Technology using Hybrid Trench Isolation with High Resistivity Substrate on Embedded RF/Analog Applications

S. Maeda,  Y. Wada,  K. Yamamoto,  H. Komurasaki,  T. Matsumoto,  Y. Hirano,  T. Iwamatsu,  Y. Yamaguchi,  T. Ipposhi,  K. Ueda,  K. Mashiko,  S. Maegawa,  M. Inuishi,  

[Date]2000/11/23
[Paper #]SDM2000-164
Improvement of analog characteristics by epitaxial channel structure

T. Ohguro,  R. Hasumi,  M. Nishigori,  H. Oyamatsu,  F. Matsuoka,  Y. Toyoshima,  

[Date]2000/11/23
[Paper #]SDM2000-165
A Direct Tunneling Memory (DTM) Utilizing Novel Floating Gate Structure

N. Horiguchi,  T. Usuki,  K. Goto,  T. Futatsugi,  T. Sugii,  N. Yokoyama,  

[Date]2000/11/23
[Paper #]SDM2000-166
[OTHERS]

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[Date]2000/11/23
[Paper #]