Electronics-Component Parts and Materials(Date:2001/10/19)

Presentation
Polymeric thin films with low dielectric constant deposited by r.f.magnetron sputtering

T. Hayashi,  N. Kikuchi,  E. Kusano,  H. Nanto,  A. Kinbara,  

[Date]2001/10/19
[Paper #]CPM2001-109
Coloring and Conductivity of Re oxide thin films

Manabu OHKUBO,  Koji MATSUO,  Nobuyuki IWATA,  Hiroshi YAMAMOTO,  

[Date]2001/10/19
[Paper #]CPM2001-110
Sputtered Species Incident to Substrate in the Sputter-deposition of TiO_2 Films

Yoichi HOSHI,  

[Date]2001/10/19
[Paper #]CPM2001-111
Low Temperature Epitaxial Growth of 3C-SiC by Triode Plasma CVD Using Dimethylsilane and Hydrogen

Masahiro HASHIBA,  Tomohiko MAEDA,  Kanji YASUI,  Tadashi AKAHANE,  

[Date]2001/10/19
[Paper #]CPM2001-112
Humidity Frequency Characteristics of The AT-Cut Quartz Crystal Resonator with The ZnO Thin Film

Mayumi KUROIWA,  Mitsuo NAKAZAWA,  Haruki SANO,  Yoshiharu ONUMA,  Kiichi KAMIMURA,  

[Date]2001/10/19
[Paper #]CPM2001-113
PREPARATION AND PROPERTIES OF YTTRIA-STABILIZED ZIRCONIA THIN FILMS BY RF MAGNETRON REACTIVE SPUTTERING

Toshiyuki Matsui,  Hidehiko Yabuuchi,  Rinpei Hayashibe,  Yoshiharu Onuma,  Kiichi Kamimura,  

[Date]2001/10/19
[Paper #]CPM2001-114
[OTHERS]

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[Date]2001/10/19
[Paper #]
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