| Presentation | 2014-12-12 Atomic Layer Deposition of Al_2O_3 Film Utilizing Water Vapor Plasma Oxidation Tomoaki UMEHARA, Masahiro HORITA, Koji YOSHITSUGU, Yasuaki ISHIKAWA, Yukiharu URAOKA, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In this paper, we reported Al_2O_3 insulation film deposited by atomic layer deposition(ALD) for application of GaN power devices. In the ALD for Al_2O_3 film deposition, we use plasma originated from water vapor for the oxidation process. We confirmed that the water vapor plasma assisted ALD leads to an increase in breakdown field compared with the conventional thermal-ALD Al_2O_3 film. Optical emission spectrometry reveals that active species originated form water vapor were generated, which contributes to the reaction. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Plasma assisted-atomic layer deposition / Al_2O_3 / water vapor plasma |
| Paper # | EID2014-36,SDM2014-131 |
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| Committee | EID |
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| Conference Date | 2014/12/5(1days) |
| Place (in Japanese) | (See Japanese page) |
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| Topics (in Japanese) | (See Japanese page) |
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| Registration To | Electronic Information Displays (EID) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Atomic Layer Deposition of Al_2O_3 Film Utilizing Water Vapor Plasma Oxidation |
| Sub Title (in English) | |
| Keyword(1) | Plasma assisted-atomic layer deposition |
| Keyword(2) | Al_2O_3 |
| Keyword(3) | water vapor plasma |
| 1st Author's Name | Tomoaki UMEHARA |
| 1st Author's Affiliation | Nara Institute of Science and Technology() |
| 2nd Author's Name | Masahiro HORITA |
| 2nd Author's Affiliation | Nara Institute of Science and Technology |
| 3rd Author's Name | Koji YOSHITSUGU |
| 3rd Author's Affiliation | Nara Institute of Science and Technology |
| 4th Author's Name | Yasuaki ISHIKAWA |
| 4th Author's Affiliation | Nara Institute of Science and Technology |
| 5th Author's Name | Yukiharu URAOKA |
| 5th Author's Affiliation | Nara Institute of Science and Technology |
| Date | 2014-12-12 |
| Paper # | EID2014-36,SDM2014-131 |
| Volume (vol) | vol.114 |
| Number (no) | 359 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |