| Presentation | 2013-10-25 Preparation of Carbon Thin Films by Gas Flow sputtering in High-Density Plasma Takuma Ishii, Yuji Satou, Takaharu Watanabe, Kiyoshi Ishii, Hiroshi Sakuma, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | High-quality diamond thin films are successfully obtained by plasma-assisted CVD. On the other hand, carbon films with a diamond single phase are hardly prepared by PVD processes such as sputtering. In order to fabricate diamond films by PVD process, we investigated the deposition process and film structure of carbon films sputtered by gas flow sputtering (GFS) method. GFS is a high-pressure (～100 Pa) sputtering and has characteristics between PVD and CVD, and, moreover, enables the film deposition in a high-density plasma. The film structures of carbon films deposited at various temperatures and plasma densities were investigated, resulting in the observation of growth of nanocrystalline diamond films at substrate temperatures above 600℃ and under high-density plasma conditions. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Sputtering / Sputtered Film / Carbon Thin Film / Diamond Thin Film |
| Paper # | CPM2013-107 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
|---|---|
| Conference Date | 2013/10/17(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Preparation of Carbon Thin Films by Gas Flow sputtering in High-Density Plasma |
| Sub Title (in English) | |
| Keyword(1) | Sputtering |
| Keyword(2) | Sputtered Film |
| Keyword(3) | Carbon Thin Film |
| Keyword(4) | Diamond Thin Film |
| 1st Author's Name | Takuma Ishii |
| 1st Author's Affiliation | Graduate School of Engineering,Utsunomiya University() |
| 2nd Author's Name | Yuji Satou |
| 2nd Author's Affiliation | Graduate School of Engineering,Utsunomiya University |
| 3rd Author's Name | Takaharu Watanabe |
| 3rd Author's Affiliation | Graduate School of Engineering,Utsunomiya University |
| 4th Author's Name | Kiyoshi Ishii |
| 4th Author's Affiliation | Graduate School of Engineering,Utsunomiya University |
| 5th Author's Name | Hiroshi Sakuma |
| 5th Author's Affiliation | Utsunomiya University |
| Date | 2013-10-25 |
| Paper # | CPM2013-107 |
| Volume (vol) | vol.113 |
| Number (no) | 268 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |