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| Presentation | 2013-10-25 11:50 Preparation of carbon thin films by gas flow sputtering in high-density plasma Takuma Ishii, Yuji Satou, Takaharu Watanabe, Kiyoshi Ishii, Hiroshi Sakuma (Utsunomiya Univ.) |
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| PDF Download Link |  CPM2013-107 Link to ES Tech. Rep. Archives: CPM2013-107 |
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