| Presentation | 2012-03-05 InGaZnOのチャネルの酸素制御とGate/Drain Offset構造によるBEOLトランジスタの高信頼化(配線・実装技術と関連材料技術) , |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
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| Paper # | SDM2011-178 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2012/2/27(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | |
| 1st Author's Affiliation | () |
| Date | 2012-03-05 |
| Paper # | SDM2011-178 |
| Volume (vol) | vol.111 |
| Number (no) | 463 |
| Page | pp.pp.- |
| #Pages | 5 |
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