| Presentation | 2008-01-30 Dopant ionization in silicon nanodevices investigated by Kelvin Probe Force Microscope Maciej Ligowski, Ratno Nuryadi, Akihiro Ichiraku, Miftahul Anwar, Ryszard Jablonski, Michiharu Tabe, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Dopant ionization was investigated by Kelvin Probe Force Microscope (KFM) measurements of surface potential of the thin silicon-on-insulator field-effect-transistor (SOI-FET) at different temperatures. In the resultant images it is observed that the surface potential is modulated by the temperature which indicates that the number of ionized dopant is changing. Also complementary simulation based on Poisson equation was performed. The results are qualitatively in agreement with the measured values. They show decreasing number of carriers when temperature is lowered. This result and interpretation are consistent with the previous freeze-out effect studies. However, direct observation of freeze-out effect hasn't been reported yet. We believe this is a significant progress towards single dopant observation. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | dopant ionization / freeze-out effect / KFM / Kelvin Probe Force Microscope |
| Paper # | ED2007-239,SDM2007-250 |
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| Conference Information | |
| Committee | SDM |
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| Conference Date | 2008/1/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Silicon Device and Materials (SDM) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Dopant ionization in silicon nanodevices investigated by Kelvin Probe Force Microscope |
| Sub Title (in English) | |
| Keyword(1) | dopant ionization |
| Keyword(2) | freeze-out effect |
| Keyword(3) | KFM |
| Keyword(4) | Kelvin Probe Force Microscope |
| 1st Author's Name | Maciej Ligowski |
| 1st Author's Affiliation | Research Institute of Electronics, Shizuoka University:Division of Sensors and Measuring Systems, Faculty of Mechatronics, Warsaw University of Technology() |
| 2nd Author's Name | Ratno Nuryadi |
| 2nd Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 3rd Author's Name | Akihiro Ichiraku |
| 3rd Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 4th Author's Name | Miftahul Anwar |
| 4th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 5th Author's Name | Ryszard Jablonski |
| 5th Author's Affiliation | Division of Sensors and Measuring Systems, Faculty of Mechatronics, Warsaw University of Technology |
| 6th Author's Name | Michiharu Tabe |
| 6th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| Date | 2008-01-30 |
| Paper # | ED2007-239,SDM2007-250 |
| Volume (vol) | vol.107 |
| Number (no) | 474 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |