Presentation 2006-07-03
Characteristic of a Self-excited Micro Cantilever and a Self-detection Self-actuation-type Micro Cantilever for AFM
Keiichi HAYASHI, Takeshi KOBAYASHI, Masaharu KURODA, Hiroshi YABUNO,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) Recently, the vital observation in liquid enviroment by atomic force microscopy (AFM) is attracts the attention of many researchers. In this research, stable and sufficiently small steady-state amplitude of cantilever to avoid damaging samples is realized by the "van der Pol" type self-excited oscillation. For that purpose, we consider using a self-actuation self-detection-type microcantilever using piezoelectric elements. The piezoelectric elements can excite the micro cantilever and detect its bending. It has advantage for the observation in the liquid because the optical method to measure the displacement of the cantilever is not necessary. In addition, AFM can be smaller than conventional one by removing optial devices.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) atomic force microscopy / piezoelectric element / self-detection self-actuation-type microcantilever / "van der Pol" type self-excited oscillation
Paper # NLP2006-29
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Conference Information
Committee NLP
Conference Date 2006/6/26(1days)
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Registration To Nonlinear Problems (NLP)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Characteristic of a Self-excited Micro Cantilever and a Self-detection Self-actuation-type Micro Cantilever for AFM
Sub Title (in English)
Keyword(1) atomic force microscopy
Keyword(2) piezoelectric element
Keyword(3) self-detection self-actuation-type microcantilever
Keyword(4) "van der Pol" type self-excited oscillation
1st Author's Name Keiichi HAYASHI
1st Author's Affiliation University of Tsukuba()
2nd Author's Name Takeshi KOBAYASHI
2nd Author's Affiliation National Institute of Advanced Indstrial Science and Technology(AIST)
3rd Author's Name Masaharu KURODA
3rd Author's Affiliation National Institute of Advanced Indstrial Science and Technology(AIST)
4th Author's Name Hiroshi YABUNO
4th Author's Affiliation University of Tsukuba
Date 2006-07-03
Paper # NLP2006-29
Volume (vol) vol.106
Number (no) 135
Page pp.pp.-
#Pages 5
Date of Issue