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Presentation
2006-07-03 15:35
Self-excited Micro Cantilever Beam with PZT Actuator and Sensor for AFM
Keiichi Hayashi
(
Univ. of Tsukuba
),
Takeshi Kobayashi
,
Masaharu Kuroda
(
AIST
),
Hiroshi Yabuno
(
Univ. of Tsukuba
)
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