| Presentation | 2017-04-21 Plasma fusion CMP® technology for GaN substrates Naoki Yamazaki, Toshiro Doi, Hideo Aida, Seongwoo Kim, Koki Oyama, Shuhei Kurokawa, Yasuhisa Sano, Masaharu Shiratani, Yoko Yamanishi, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | SDM2017-5,OME2017-5 |
| Date of Issue | 2017-04-13 (SDM, OME) |
| Conference Information | |
| Committee | OME / SDM |
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| Conference Date | 2017/4/20(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Tatsugochou Shougaigakushuu Center |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Organic molecular devices, silicon device, biotechnology, thin film device, novel material, evaluation method, etc |
| Chair | Naoki Matsuda(AIST) / Tatsuya Kunikiyo(Renesas) |
| Vice Chair | Tatsuo Mori(Aichi Inst. of Tech.) / Takahiro Shinada(Tohoku Univ.) |
| Secretary | Tatsuo Mori(NTT) / Takahiro Shinada(Univ. of Tokyo) |
| Assistant | Hirotake Kajii(Osaka Univ.) / Dai Taguchi(Tokyo Inst. of Tech.) / Hiroya Ikeda(Shizuoka Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Organic Molecular Electronics / Technical Committee on Silicon Device and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Plasma fusion CMP® technology for GaN substrates |
| Sub Title (in English) | Evaluation of processing characteristics for plasma fusion CMP® using Ar plasma and ethanol bubbling |
| Keyword(1) | |
| 1st Author's Name | Naoki Yamazaki |
| 1st Author's Affiliation | Kyushu University/Namiki PrecisionJewel Co.,LTD(Kyushu Univ./Namiki PrecisionJewel Co.,LTD) |
| 2nd Author's Name | Toshiro Doi |
| 2nd Author's Affiliation | Kyushu University(Kyushu Univ) |
| 3rd Author's Name | Hideo Aida |
| 3rd Author's Affiliation | Kyushu University/Namiki PrecisionJewel Co.,LTD(Kyushu Univ./Namiki PrecisionJewel Co.,LTD) |
| 4th Author's Name | Seongwoo Kim |
| 4th Author's Affiliation | Namiki PrecisionJewel Co.,LTD(Namiki PrecisionJewel Co.,LTD) |
| 5th Author's Name | Koki Oyama |
| 5th Author's Affiliation | Namiki PrecisionJewel Co.,LTD(Namiki PrecisionJewel Co.,LTD) |
| 6th Author's Name | Shuhei Kurokawa |
| 6th Author's Affiliation | Kyushu University(Kyushu Univ) |
| 7th Author's Name | Yasuhisa Sano |
| 7th Author's Affiliation | Osaka University(Osaka Univ.) |
| 8th Author's Name | Masaharu Shiratani |
| 8th Author's Affiliation | Kyushu University(Kyushu Univ) |
| 9th Author's Name | Yoko Yamanishi |
| 9th Author's Affiliation | Kyushu University(Kyushu Univ) |
| Date | 2017-04-21 |
| Paper # | SDM2017-5,OME2017-5 |
| Volume (vol) | vol.117 |
| Number (no) | SDM-7,OME-8 |
| Page | pp.pp.19-23(SDM), pp.19-23(OME), |
| #Pages | 5 |
| Date of Issue | 2017-04-13 (SDM, OME) |