Presentation 2015-11-26
Analysis of hole concentration and mobility of lightly Mg-doped p-type GaN by Hall-effect measurements
Masahiro Horita, Shinya Takashima, Ryo Tanaka, Hideaki Matsuyama, Katsunori Ueno, Masaharu Edo, Jun Suda,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) Lightly-Mg-doped p-type gallium nitride (GaN) with the Mg concentration of $6.5times 10^{16}~mbox{cm}^{-3}$ was characterized by Hall-effect measurements for analysis of the hole concentration and mobility. The Mg-doped p-GaN with the thickness of $1~mumbox{m}$ was grown on free-standing GaN substrate by metal-organic vapor-phase epitaxy, the threading dislocation density of which was $4times 10^{6}~mbox{cm}^{-2}$ measured by cathodoluminescence mapping. Hall-effect measurements of the p-GaN were carried out at a temperature in the range from 160 to 450K. It was revealed a low compensation ratio of less than 1% and the hole mobility of $33~mbox{cm}^2mbox{/Vs}$ at room temperature.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Gallium nitride / metal-organic vapor-phase epitaxy / lightly-Mg doped / Hall effect / hole density / hole mobility
Paper # ED2015-72,CPM2015-107,LQE2015-104
Date of Issue 2015-11-19 (ED, CPM, LQE)

Conference Information
Committee ED / LQE / CPM
Conference Date 2015/11/26(2days)
Place (in Japanese) (See Japanese page)
Place (in English) Osaka City University Media Center
Topics (in Japanese) (See Japanese page)
Topics (in English) Nitride Semiconductor Devices, Materials, Related Technologies
Chair Koichi Maezawa(Univ. of Toyama) / Hajime Shoji(Sumitomo Electric Industries) / Satoru Noge(Numazu National College of Tech.)
Vice Chair Kunio Tsuda(Toshiba) / Susumu Noda(Kyoto Univ.) / Fumihiko Hirose(Yamagata Univ.)
Secretary Kunio Tsuda(NEC) / Susumu Noda(JAIST) / Fumihiko Hirose(NICT)
Assistant Manabu Arai(New JRC) / Masataka Higashiwaki(NICT) / / Takashi Sakamoto(NTT) / Yuichi Nakamura(Toyohashi Univ. of Tech.)

Paper Information
Registration To Technical Committee on Electron Device / Technical Committee on Lasers and Quantum Electronics / Technical Committee on Component Parts and Materials
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Analysis of hole concentration and mobility of lightly Mg-doped p-type GaN by Hall-effect measurements
Sub Title (in English)
Keyword(1) Gallium nitride
Keyword(2) metal-organic vapor-phase epitaxy
Keyword(3) lightly-Mg doped
Keyword(4) Hall effect
Keyword(5) hole density
Keyword(6) hole mobility
1st Author's Name Masahiro Horita
1st Author's Affiliation Kyoto University(Kyoto Univ.)
2nd Author's Name Shinya Takashima
2nd Author's Affiliation Fuji Electric Co., Ltd.(Fuji Electric)
3rd Author's Name Ryo Tanaka
3rd Author's Affiliation Fuji Electric Co., Ltd.(Fuji Electric)
4th Author's Name Hideaki Matsuyama
4th Author's Affiliation Fuji Electric Co., Ltd.(Fuji Electric)
5th Author's Name Katsunori Ueno
5th Author's Affiliation Fuji Electric Co., Ltd.(Fuji Electric)
6th Author's Name Masaharu Edo
6th Author's Affiliation Fuji Electric Co., Ltd.(Fuji Electric)
7th Author's Name Jun Suda
7th Author's Affiliation Kyoto University(Kyoto Univ.)
Date 2015-11-26
Paper # ED2015-72,CPM2015-107,LQE2015-104
Volume (vol) vol.115
Number (no) ED-329,CPM-330,LQE-331
Page pp.pp.21-25(ED), pp.21-25(CPM), pp.21-25(LQE),
#Pages 5
Date of Issue 2015-11-19 (ED, CPM, LQE)