Presentation 2015-04-30
Influence of TEOS-SiO2 cap layer on Au induced lateral crystallization for amorphous Ge on insulator
Kazuki Kudo, Kinta Kusano, Takatsugu Sakai, Shinichi Motoyama, Yutaka Kusuda, Masahiro Furuta, Nobuyuki Naka, Tomoko Numata, Kenichiro Takakura, Isao Tsunoda,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English)
Keyword(in Japanese) (See Japanese page)
Keyword(in English)
Paper # SDM2015-11,OME2015-11
Date of Issue 2015-04-22 (SDM, OME)

Conference Information
Committee OME / SDM
Conference Date 2015/4/29(2days)
Place (in Japanese) (See Japanese page)
Place (in English) Oh-hama Nobumoto Memorial Hall
Topics (in Japanese) (See Japanese page)
Topics (in English) Thin FIlms, Functional Electronics Devices, New Functional Materials and Evaluation, BIomtechnology
Chair Keizo Kato(Niigata Univ.) / Yuzou Oono(Univ. of Tsukuba)
Vice Chair Naoki Matsuda(AIST) / Tatsuya Kunikiyo(Renesas)
Secretary Naoki Matsuda(Canon Electronics) / Tatsuya Kunikiyo(Aichi Inst. of Tech.)
Assistant Akihiro Kohno(NTT) / Shinichiro Inoue(NICT) / Tadashi Yamaguchi(Renesas)

Paper Information
Registration To Technical Committee on Organic Molecular Electronics / Technical Committee on Silicon Device and Materials
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Influence of TEOS-SiO2 cap layer on Au induced lateral crystallization for amorphous Ge on insulator
Sub Title (in English)
Keyword(1)
1st Author's Name Kazuki Kudo
1st Author's Affiliation Kumamoto National College of Technology(KNCT)
2nd Author's Name Kinta Kusano
2nd Author's Affiliation Kumamoto National College of Technology(KNCT)
3rd Author's Name Takatsugu Sakai
3rd Author's Affiliation Kumamoto National College of Technology(KNCT)
4th Author's Name Shinichi Motoyama
4th Author's Affiliation SAMCO(SAMCO)
5th Author's Name Yutaka Kusuda
5th Author's Affiliation SAMCO(SAMCO)
6th Author's Name Masahiro Furuta
6th Author's Affiliation SAMCO(SAMCO)
7th Author's Name Nobuyuki Naka
7th Author's Affiliation HORIBA(HORIBA)
8th Author's Name Tomoko Numata
8th Author's Affiliation HORIBA(HORIBA)
9th Author's Name Kenichiro Takakura
9th Author's Affiliation Kumamoto National College of Technology(KNCT)
10th Author's Name Isao Tsunoda
10th Author's Affiliation Kumamoto National College of Technology(KNCT)
Date 2015-04-30
Paper # SDM2015-11,OME2015-11
Volume (vol) vol.115
Number (no) SDM-18,OME-19
Page pp.pp.41-44(SDM), pp.41-44(OME),
#Pages 4
Date of Issue 2015-04-22 (SDM, OME)