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Presentation |
2015-04-30 11:05
Influence of TEOS-SiO2 cap layer on Au induced lateral crystallization for amorphous Ge on insulator Kazuki Kudo, Kinta Kusano, Takatsugu Sakai (KNCT), Shinichi Motoyama, Yutaka Kusuda, Masahiro Furuta (SAMCO), Nobuyuki Naka, Tomoko Numata (HORIBA), Kenichiro Takakura, Isao Tsunoda (KNCT) |
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SDM2015-11 OME2015-11 Link to ES Tech. Rep. Archives: SDM2015-11 OME2015-11 |
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