Electronics-Silicon Devices and Materials(Date:2005/09/30)

Presentation
表紙

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[Date]2005/9/30
[Paper #]
目次

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[Date]2005/9/30
[Paper #]
Ni_xSi/HfSiON Gate Structure for 45nm-node CMOS Technology

Motofumi Saitoh,  Masayuki TERAI,  Kensuke TAKAHASHI,  Takashi HASE,  Takashi OGURA,  Toru TATSUMI,  Hirohito WATANABE,  

[Date]2005/9/30
[Paper #]SDM2005-180
Improvement of V_ Stability during BT Stress by HfSiON high-k Gate Formation Process

Masao INOUE,  Masaharu MIZUTANI,  Koji NOMURA,  Jiro YUGAMI,  Junichi TSUCHIMOTO,  Yoshikazu OHNO,  Masahiro YONEDA,  

[Date]2005/9/30
[Paper #]SDM2005-181
A Study on Ultra Thin HfON Films Formed by ECR-Ar/N_2 Plasma

Masaki SATOH,  Tomoki KUROSE,  Shunichiro OHMI,  

[Date]2005/9/30
[Paper #]SDM2005-182
Characterization of Ultra-thin HfSiON Films Formed by ECR Ar/O_2 Plasma Oxidation of HfN Films

Tomoki KUROSE,  Masaki SATOH,  Shunichiro OHMI,  

[Date]2005/9/30
[Paper #]SDM2005-183
EOT Measurement by LC Resonance Method for Ultra Thin Gate Dielectrics

Rihito KURODA,  Akinobu TERAMOTO,  Masanori KOMURA,  Kazufumi WATANABE,  Shigetoshi SUGAWA,  Tadahiro OHMI,  

[Date]2005/9/30
[Paper #]SDM2005-184
Development of the Classical Molecular Dynamics Program that Implemented the Chemical Reaction Function

Ryuji MIURA,  Hideyuki TSUBOI,  Michihisa KOYAMA,  Akira ENDO,  Momoji KUBO,  Carpio Carlos A. Del,  Akira MIYAMOTO,  

[Date]2005/9/30
[Paper #]SDM2005-185
Computational Analysis about Doping Process into Preamorphized Silicon Substrate by using Hybrid Quantum Chemical Molecular Dynamics Method

Tsuyoshi MASUDA,  Hideyuki TSUBOI,  Michihisa KOYAMA,  Akira ENDOU,  Momoji KUBO,  Carpio Carlos A. Del,  Akira MIYAMOTO,  

[Date]2005/9/30
[Paper #]SDM2005-186
Theoretical simulation on the excited state properties : Effect of lanthanide ion dopant in yttrium oxide and yttrium oxy-sulphide

Agalya GOVINDASAMY,  Chen LV,  Hideyuki TSUBOI,  Michihisa KOYAMA,  Akira ENDOU,  Carlos A. DELCARPIO,  Momoji KUBO,  Akira MIYAMOTO,  

[Date]2005/9/30
[Paper #]SDM2005-187
Theoretical Investigation on Degradation Process of MgO Protecting Layer in Plasma Display and Design of New MgO Protecting Layer

Momoji KUBO,  Hiromi KIKUCHI,  Hideyuki TSUBOI,  Michihisa KOYAMA,  Akira ENDOU,  CARPIO Carlos A. DEL,  Akira MIYAMOTO,  

[Date]2005/9/30
[Paper #]SDM2005-188
Study on the Role of Oxygen Vacancies of Indium Tin Oxide by Density Functional Theory and Accelerated Quantum Chemical Molecular Dynamics Method

Chen Lv,  Xiaojing Wang,  Agalya Govindasamy,  Hideyuki Tsuboi,  Michihisa Koyama,  Akira Endou,  Momoji Kubo,  Carpio Carlos A. Del,  Akira Miyamoto,  

[Date]2005/9/30
[Paper #]SDM2005-189
Theoretical investigation on the electronic properties of conjugated double and triple bond linear carbon chains

Arunabhiram CHUTIA,  Zhigang ZHU,  Hideyuki TSUBOI,  Michihisa KOYAMA,  Akira ENDOU,  Momoji KUBO,  Akira MIYAMOTO,  

[Date]2005/9/30
[Paper #]SDM2005-190
Investigation of the Electrical and Electronic Properties of Semiconductor Oxide Gas Sensors by Tight-Binding Quantum Calculations

Zhigang Zhu,  Arunabhiram Chutia,  Hideyuki Tsuboi,  Michihisa Koyama,  Akira Endou,  Carpio Carlos A. Del,  Momoji Kubo,  Akira Miyamoto,  

[Date]2005/9/30
[Paper #]SDM2005-191
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[Date]2005/9/30
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[Date]2005/9/30
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[Date]2005/9/30
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