IEICE Technical Committee

Electronics-Silicon Devices and Materials(Date:2003/06/23)

Presentation

[Date]2003/6/23
[Paper #]

[Invited]Front-End Process Technology for Sub-50nm CMOS and Beyond(AWAD2003 : Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices)

Yoshitaka TSUNASHIMA,

[Date]2003/6/23
[Paper #]ED2003-63,SDM2003-74

Junction Leakage Characteristics of Shallow Trench Isolation (STI) with Nitrogen Pile-Up Sidewall Oxide(AWAD2003 : Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices)

Myeong Won Lee, In Man Kang, Byung Yong Choi, Dong-Soo Woo, Woo Young Choi, Jong Duk Lee, Byung-Gook Park,

[Date]2003/6/23
[Paper #]ED2003-64,SDM2003-75

Shallow Junction formed by UV Pulsed Laser Annealing for Si Micro-Electronics(AWAD2003 : Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices)

Takashi NOGUCH,

[Date]2003/6/23
[Paper #]ED2003-65,SDM2003-76

Fabrication of low loss transmission line with Surface micromachining technology(AWAD2003 : Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices)

Han-Shin Lee, Sung-Chan Kim, Byoung-Ok Lim, Kyoung-Man Kim, Won-Young Uhm, Young-Hoon Chun, Dong-Hoon Shin, Soon-Koo Kim, Hyun-Chang Park, Jin-Koo Rhee,

[Date]2003/6/23
[Paper #]ED2003-66,SDM2003-77

Structural Analyses of Cu[111] Layer on Nb[110] Barrier Formed on SiO_2(AWAD2003 : Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices)

Md. MANIRUZZAMAN, Mayumi B. Takeyama, Yuichiro HAYASAKA, Eiji AOYAGI, Tetu OHSUNA, Atsushi NOYA,

[Date]2003/6/23
[Paper #]ED2003-67,SDM2003-78

[Invited]High Performance Poly-silicon TFT by Excimer Laser Annealing(AWAD2003 : Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices)

Min Koo Han,

[Date]2003/6/23
[Paper #]ED2003-68,SDM2003-79

Effects of Self-Aligned Field Induced Drain with Double Spacer on the Characteristics of Pol-Si TFT(AWAD2003 : Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices)

Jeong-Ah Ahn, Ohyun Kim,

[Date]2003/6/23
[Paper #]ED2003-69,SDM2003-80

Properties of LiNbO_3 thin films fabricated by CSD (Chemical Solution Decomposition) method(AWAD2003 : Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices)

Yong-Seong Kim, Soon-Won Jung, Sang-Hyun Jeong, Yong-Il In, Kwang-Ho Kim, Kwangsoo No,

[Date]2003/6/23
[Paper #]ED2003-70,SDM2003-81

Local characterization of electronic transport in microcrystalline germanium thin films by atomic force microscopy using a conducting probe(AWAD2003 : Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices)

K Makihara, Y Okamoto, H Nakagawa, M Ikeda, H Murakami, S Miyazaki,

[Date]2003/6/23
[Paper #]ED2003-71,SDM2003-82

[Invited]Double-Gate MOSFETs for Nano CMOS Technology : Body-tied Double-Gate MOSFETs(AWAD2003 : Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices)

Jong-Ho Lee, Tai-su Park, Euijoon Yoon,

[Date]2003/6/23
[Paper #]ED2003-72,SDM2003-83

[Invited]Potential of SOI Devices in Sub-100-nm Technology Era : Challenging Studies(AWAD2003 : Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices)

Yasuhisa Omura,

[Date]2003/6/23
[Paper #]ED2003-73,SDM2003-84

Reverse-Order Source/Drain with Double Offset Spacer (RODOS) for Sub-5Onm Low-Power and High-Speed MOSFET Design(AWAD2003 : Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices)

Woo Young Choi, Byung Yong Choi, Dong-Soo Woo, long Duk Lee, Byung-Gook Park,

[Date]2003/6/23
[Paper #]ED2003-74,SDM2003-85

High-Voltage MOS Devices with High Energy Implanted Buried Layer : Low-Voltage CMOS Process Comparable High-Voltage MOS Devices(AWAD2003 : Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices)

Pyong-Su Kwag, Chul-Ju Ko, Oh-Kyong Kwon,

[Date]2003/6/23
[Paper #]ED2003-75,SDM2003-86

Design of an IC-Card Interface Chipset with 3.3V / 5V DC-DC Converter(AWAD2003 : Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices)

Won-Seok Oh, Seung-Eun Lee, Kyoung-Youn Cho, Jeong-Wook Seo, Sung-Chul Lee,

[Date]2003/6/23
[Paper #]ED2003-76,SDM2003-87

[Invited]Ultra-High-Speed InP-Based HEMTs with Sub-50-nm Gate : Impact of Side-Gate-Recess and Parasitic Resistance on High-Speed Performance(AWAD2003 : Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices)

Keisuke SHINOHARA, Yoshimi YAMASHlTA, Akira ENDOH, Issei WATANABE, Kohki HlKOSAKA, Takashi MIMURA, Satoshi HlYAMIZU, Toshiaki MATSUI,

[Date]2003/6/23
[Paper #]ED2003-77,SDM2003-88

Optimization Study on the Epitaxial Structures of Over-100-GHz Metamorphic HEMTs for the Millimeter-wave Applications(AWAD2003 : Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices)

Myung-Sik Son, Mi-Ra Kim, Bok-Hyoung Lee, Jin-Koo Rhee,

[Date]2003/6/23
[Paper #]ED2003-78,SDM2003-89

Optical Characteristics of InP/InGaAs HBTs(AWAD2003 : Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices)

Jae-Hong Park, Kang-Dae Kim, Yong-Kyu Kim, Moon-Tae Jung, Sung-Bum Hwang, Chung-Kun Song,

[Date]2003/6/23
[Paper #]ED2003-79,SDM2003-90

Bias acceleration of drain resistance increase in InP-based HEMTs and lifetime enhancement by low-bias design of ICs(AWAD2003 : Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices)

Yoshino K. Fukai, Suehiro Sugitani, Takatomo Enoki, Hiroto Kitabayashi, Koichi Murata, Takashi Makimura, Yasuro Yamane, Masahiro Muraguchi,

[Date]2003/6/23
[Paper #]ED2003-80,SDM2003-91