Electronics-Silicon Devices and Materials(Date:1997/07/25)

Presentation
表紙

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[Date]1997/7/25
[Paper #]
CONTENTS

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[Date]1997/7/25
[Paper #]
Shallow Trench Isolation Characteristics with High-Density-Plasma (HDP) CVD Oxide for Deep-Submicron CMOS Technologies

Seungho Lee,  Kuchul Jung,  Sungwoong Chung,  Jeongdong Choe,  Wouns Yang,  Youngjong Lee,  Jinwon Park,  

[Date]1997/7/25
[Paper #]SDM97-68
Bird's Beak free LOCOS Isolation for 256M DRAM

Cheol Soo Park,  Chi-Sun Hwang,  Young Tag Woo,  Sung-Joo Hong,  In Sul Chung,  Sung Wook Park,  

[Date]1997/7/25
[Paper #]SDM97-69
Defects study of retrograde twin well CMOS that has MeV ion implanted buried layer

Jong-Kwan KIM,  Seong-Hyung Park,  Yun Jun Huh,  Nam hoon Cho,  Young Ho Kim,  In Soo Kim,  Wouns Yang,  Young-Jong LEE,  Jung Mo Hwang,  Yung-Kwon SUNG,  

[Date]1997/7/25
[Paper #]SDM97-70
Oxide Reliability Improvement Controlling Microstructures of Substrate/Oxide and Oxide/Gate Interfaces

Jiro Yugami,  Toshiyuki Mine,  Toshihiko Itoga,  Makoto Ohkura,  

[Date]1997/7/25
[Paper #]SDM97-71
Application of PECVD-WNx Electrode for Ta_2O_5 Capacitor

Byung-Lyul Park,  Myoung-Bum Lee,  Hyeon-Deok Lee,  Ho-Kyu Kang,  Moon-Yong Lee,  

[Date]1997/7/25
[Paper #]SDM97-72
A Highly Reliable 0.25μm MOSFETs with Ultra-Thin Oxidized Nitride Gate Dielectric

Toyoji Yamamoto,  Takashi Ogura,  Yukishige Saito,  Ken'ichi Uwasawa,  Toru Tatsumi,  Toru Mogami,  

[Date]1997/7/25
[Paper #]SDM97-73
Degradation and Recovery in the Ferroelectric Properties of Pt/Pb(Zr,Ti)O_3/Pt capacitor caused by SiO_2 Film Deposition

Sejun Oh,  Cha Young Yoo,  Sang In Lee,  Moon Yong Lee,  

[Date]1997/7/25
[Paper #]SDM97-74
A 40-Gb/s 8×8 ATM Switch LSI using 0.25-μm CMOS/SIMOX

Sadayuki Yasuda,  Yusuke Ohtomo,  Masafumi Nogawa,  Jun-ichi Inoue,  Kimihiro Yamakoshi,  Hirotoshi Sawada,  Masayuki Ino,  Shigeo Urushidani,  Shigeki Hino,  Yasuhiro Sato,  Yuichiro Takei,  Takumi Watanabe,  Ken Takeya,  

[Date]1997/7/25
[Paper #]SDM97-75
A 3.3 V 0.8 μm CMOS IF IC for CDMA/FM Cellular Phone

Chang-Jun Oh,  Ook Kim,  Jong-Kee Kwon,  Jong-Ryul Lee,  Q-Sang Song,  Wonchul Song,  Kyung-Soo Kim,  Hyung-Moo Park,  

[Date]1997/7/25
[Paper #]SDM97-76
Searchable Address Queue for ATM switch

Masahiko Ishiwaki,  Hiromi Notani,  Harufusa Kondoh,  Hirotaka Saito,  Atsushi Iwabu,  Kazuo Kawaguchi,  Masaya Kitao,  Yasunobu Nakase,  Yoshio Matsuda,  Takeshi Tokuda,  

[Date]1997/7/25
[Paper #]SDM97-77
A 5-Mask CMOS Technology utilizing SOI Substrate

Kiyotaka Imai,  Hideaki Onishi,  Hiroyuki Nakamura,  Yoshihisa Matsubara,  Takashi Ishigami,  Tetsuya Sakai,  Tadahiko Horiuchi,  

[Date]1997/7/25
[Paper #]SDM97-78
EVALUATION OF SOI WAFERS USING C-V CHARACTERISTICS OF THIN-FILM MOS CAPACTOR

Jong-Wook Lee,  Ji-Woon Yang,  Won-Chang Lee,  Min-Rok Oh,  Yo-Hwan Koh,  

[Date]1997/7/25
[Paper #]SDM97-79
Characteristics of buried-channel pMOS devices with shallow counter-doped layers fabricated using channel preamorphization

Masayasu Miyake,  

[Date]1997/7/25
[Paper #]SDM97-80
Effects of Low Temperature Interlayer Dielectric Films on the Gate Oxide Quality of Deep Submicron MOSFET's

sang-Gi Lee,  Hyunsang Hwang,  Young-Jong Lee,  Jeong-Mo Hwang,  Ju-Young Jeong,  Oh-Kyong Kwon,  Chang-Hyo Lee,  

[Date]1997/7/25
[Paper #]SDM97-81
[OTHERS]

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[Date]1997/7/25
[Paper #]