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Technical Committee on Silicon Device and Materials (SDM) (Searched in: 2008)
Search Results: Keywords 'from:2008-10-09 to:2008-10-09'
| Committee | Date Time | Place | Paper Title / Authors | Abstract | Paper # | |
| SDM | 2008-10-09 13:30 |
Miyagi | Tohoku Univ. | Evaluation of Post Cu-CMP Cleaning Chemicals for Non-Porous Ultra Low-k Dielectric Fluorocarbon Film Xun Gu, Takenao Nemoto, Akinobu Teramoto, Takashi Ito, Tadahiro Ohmi (Tohoku Univ.)  SDM2008-149 |
[more] | SDM2008-149 pp.1-6 |
| SDM | 2008-10-09 14:00 |
Miyagi | Tohoku Univ. | Investigation of Novel End-Point-Detection for Ta/Cu CMP Xun Gu, Takenao Nemoto (Tohoku Univ.), Ara Philipossian, Yasa Adi Sampurno (Univ. of Arizona/Araca), Jiang Cheng (Araca), Yun Zhuang (Univ. of Arizona/Araca), Akinobu Teramoto, Takashi Ito, Tadahiro Ohmi (Tohoku Univ.) SDM2008-150 |
[more] | SDM2008-150 pp.7-12 |
| SDM | 2008-10-09 14:30 |
Miyagi | Tohoku Univ. | Planarization of CW laser crystallized Si thin films by chemical mechanical polishing using slurry with ethyl alcohol Masayuki Numata, Shin-Ichiro Kuroki, Shuntaro Fujii, Koji Kotani, Takashi Ito (Tohoku Univ.) SDM2008-151 |
CW laser crystallization of amorphous silicon films is a promising method to realize thin film transistor with high per... [more] | SDM2008-151 pp.13-16 |
| SDM | 2008-10-09 15:00 |
Miyagi | Tohoku Univ. | Development of Multi-Scale Simulator for lifetime of Interconnect and its application to Cu lines Hideyuki Tsuboi, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Carlos A Del Calpio, Momoji Kubo, Akira Miyamoto (Tohoku Univ.) SDM2008-152 |
[more] | SDM2008-152 pp.17-18 |
| SDM | 2008-10-09 15:45 |
Miyagi | Tohoku Univ. | Computational Study on Friction Behavior and Nanostructure of Diamond-like Carbon (DLC) Takanori Kuriaki, Yusuke Morita, Tasuku Onodera, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Carlos A. Del Carpio, Momoji Kubo, Akira Miyamoto (Tohoku Univ.) SDM2008-153 |
Industrially, diamond-like carbon (DLC) is one of the useful tribological materials with low friction and anti-wear char... [more] | SDM2008-153 pp.19-20 |
| SDM | 2008-10-09 16:15 |
Miyagi | Tohoku Univ. | Tight-Binding Quantum Chemistry Study on Excitation Properties of Perylene with Acrylic Acid on Anatas(001) Surface Chen Lv, Kei Ogiya, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Carlos A. Del Carpio, Momoji Kubo, Akira Miyamoto (Tohoku Univ.) SDM2008-154 |
[more] | SDM2008-154 pp.21-22 |
| SDM | 2008-10-09 16:45 |
Miyagi | Tohoku Univ. | A Computational Study on Secondary Electron Emission property of Protecting Layer for Plasma Display Panels Kazumi Serizawa, Itaru Yamashita, Hiroaki Onuma (Tohoku Univ.), Hiromi Kikuchi (Tohoku Univ./Hiroshima Univ.), Masaki Kitagaki (Hiroshima Univ.), Ai Suzuki, Sahnoun Riadh, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Del Carpio Carlos Del Carpio, Momoji Kubo (Tohoku Univ.), Hiroshi Kajiyama (Hiroshima Univ.) SDM2008-155 |
[more] | SDM2008-155 pp.23-24 |
| SDM | 2008-10-09 17:15 |
Miyagi | Tohoku Univ. | Development of characterization/spectroscopic simulators based on ultra-accelerated quantum chemical molecular dynamics method and its application to Si semiconductors Akira Endou, Itaru Yamashita, Kazumi Serizawa, Hiroaki Onuma, Tasuku Onodera, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Hiromitsu Takaba, Carlos A. Del Carpio, Momoji Kubo, Akira Miyamoto (Tohoku Univ.) SDM2008-156 |
[more] | SDM2008-156 pp.25-28 |
| SDM | 2008-10-10 10:00 |
Miyagi | Tohoku Univ. | Electron Transport Simulation of Dye-sensitized TiO2 Electrode based on 3D Porous Structure Kei Ogiya, Chen Lv, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Carlos A. Del Carpio, Momoji Kubo, Akira Miyamoto (Tohoku Univ.) SDM2008-157 |
[more] | SDM2008-157 pp.29-30 |
| SDM | 2008-10-10 10:30 |
Miyagi | Tohoku Univ. | A Computational Chemistry Study on Structure and Carrier Transport Property of Light Emitting Materials Itaru Yamashita, Hiroaki Onuma, Kazumi Serizawa, Ai Suzuki, Sahnoun Riadh, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Carlos A. Del Carpio, Momoji Kubo, Akira Miyamoto (Tohoku Univ) SDM2008-158 |
[more] | SDM2008-158 pp.31-32 |
| SDM | 2008-10-10 11:00 |
Miyagi | Tohoku Univ. | Structure Analysis of Phosphors Materials by Experiment Integrated Computational Chemistry Hiroaki Onuma, Itaru Yamashita, Kazumi Serizawa, Ai Suzuki, Sahnoun Riadh, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Carlos A. Del Carpio, Momoji Kubo, Akira Miyamoto (Tohoku Univ.) SDM2008-159 |
[more] | SDM2008-159 pp.33-34 |
| SDM | 2008-10-10 11:30 |
Miyagi | Tohoku Univ. | Development of Ultra-accelerated Quantum Chemical Molecular Dynamics Method for Ferroelectric Properties of Perovskite BaTiO3 HongJun Xiao, Takashi Hirai, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Carlos A. Del Carpio, Momoji Kubo, Akira Miyamoto (Tohoku Univ.) SDM2008-160 |
arium titanate is a kind of strong dielectric materials that have perovskite structure, which shows wide applications in... [more] | SDM2008-160 pp.35-36 |
| SDM | 2008-10-10 13:00 |
Miyagi | Tohoku Univ. | The Application Property of B18H22 Implantation for Millisecond Annealing Yoji Kawasaki, Seiichi Endo, Masashi Kitazawa, Yoshiki Maruyama, Tomohiro Yamashita, Takashi Kuroi, Hidefumi Yoshimura, Masahiro Yoneda (Renesas) SDM2008-161 |
We investigated the application properties of cluster implantation for milli-second annealing processing. We successful... [more] | SDM2008-161 pp.37-40 |
| SDM | 2008-10-10 13:30 |
Miyagi | Tohoku Univ. | A study on work function modulation in PtSi alloying with Hf Jun Gao, Jumpei Ishikawa, Shun-ichiro Ohmi (Tokyo Tech) SDM2008-162 |
Mechanisms of work function modulation in PtSi alloying with Hf was investigated. When a silicidation of Pt(15 nm)/Hf(8 ... [more] | SDM2008-162 pp.41-44 |
| SDM | 2008-10-10 14:00 |
Miyagi | Tohoku Univ. | Statistical evaluation of characteristics variation and RTS noise of MOSFETs Takafumi Fujisawa, Shigetoshi Sugawa, Syunichi Watabe, Kenichi Abe, Akinobu Teramoto, Tadahiro Ohmi (Tohoku Univ.) SDM2008-163 |
[more] | SDM2008-163 pp.45-50 |
| SDM | 2008-10-10 14:30 |
Miyagi | Tohoku Univ. | Impact of Fully Depleted Silicon-On-Insulator Accumualation-mode CMOS on Si(110) Ching Foa Tye, Weitao Cheng, Akinobu Teramoto, Shigetoshi Sugawa, Tadahiro Ohmi (Tohoku Univ.) SDM2008-164 |
This paper demonstrates the characteristic of Accumulation-mode Fully Depleted Silicon-On-Insulator (Acc-FD-SOI) MOSFETs... [more] | SDM2008-164 pp.51-56 |
| SDM | 2008-10-10 15:15 |
Miyagi | Tohoku Univ. | Correlation between Stress Induced Leakage Current and Random Telegraph Signal noise Yuki Kumagai, Akinobu Teramoto, Kenichi Abe, Takafumi Fujisawa, Syunichi Watabe, Tomoyuki Suwa, Naoto Miyamoto, Shigetoshi Sugawa, Tadahiro Ohmi (Tohoku Univ.) SDM2008-165 |
In this paper, we report the correlation between anomalous stress-induced leakage current (SILC) and random telegraph si... [more] | SDM2008-165 pp.57-62 |
| SDM | 2008-10-10 15:45 |
Miyagi | Tohoku Univ. | Influence of B and P dopants on SiO2 film characteristics Satoshi Nagashima, Hiroshi Akahori (Toshiba) SDM2008-166 |
In general, the silicon material that has doped impurities such as phosphorus, boron, and arsenic to the diffusion and t... [more] | SDM2008-166 pp.63-68 |
| SDM | 2008-10-10 16:15 |
Miyagi | Tohoku Univ. | Study on Compositional Transition Layers at Gate Dielectrics/Si Interface by using Angle-resolved X-ray Photoelectron Spectroscopy Tomoyuki Suwa (Tohoku Univ.), Takashi Aratani (Shin-Etsu Chemi.), Masaaki Higuchi (Toshiba), Shigetoshi Sugawa (Tohoku Univ.), Eiji Ikenaga (JASRI), Jiro Ushio (Hitachi), Hiroshi Nohira (Musashi Inst. of Tech.), Akinobu Teramoto, Tadahiro Ohmi, Takeo Hattori (Tohoku Univ.) SDM2008-167 |
Soft x-ray-excited angle-resolved photoemission results for nitride films formed using nitrogen-hydrogen radicals on Si(... [more] | SDM2008-167 pp.69-74 |
| SDM | 2008-10-10 16:45 |
Miyagi | Tohoku Univ. | The data analysis and measurement technique of the atomic force microscopy for the atomically flat silicon surface Masahiro Konda, Akinobu Teramoto, Tomoyuki Suwa, Rihito Kuroda, Tadahiro Ohmi (Tohoku Univ) SDM2008-168 |
(To be available after the conference date) [more] | SDM2008-168 pp.75-78 |
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