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Chair |
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Yuzou Oono (Univ. of Tsukuba) |
Vice Chair |
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Tatsuya Kunikiyo (Renesas) |
Secretary |
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Rihito Kuroda (Tohoku Univ.) |
Assistant |
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Tadashi Yamaguchi (Renesas) |
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Conference Date |
Mon, Mar 2, 2015 10:00 - 16:00 |
Topics |
http://www.ieice.org/jpn/about/syozai.html |
Conference Place |
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Transportation Guide |
https://www.ieice.org/eng/about/location.html |
Sponsors |
This conference is co-sponsored by The Japan Society of Applied Physics.
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Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Mon, Mar 2 AM 10:00 - 16:00 |
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10:00-10:05 |
Opening Address ( 5 min. ) |
(1) |
10:05-10:35 |
[Invited Talk]
Bio-MEMS towards Single-Molecular Characterization SDM2014-162 |
Momoko Kumemura, Hiroyuki Fujita (Univ. of Tokyo) |
(2) |
10:35-11:05 |
[Invited Talk]
Integration Technology of 3D FPGA with Performance Scalability and Function Flexibility SDM2014-163 |
Kenichi Takeda, Mayu Aoki (Hitachi) |
(3) |
11:05-11:35 |
[Invited Talk]
High-density and Athermal Silicon Optical Interposers for Inter-chip Interconnects SDM2014-164 |
Takahiro Nakamura, Yutaka Urino (PETRA), Yasuhiko Arakawa (Univ. of Tokyo) |
(4) |
11:35-12:05 |
[Invited Talk]
Formation of Epitaxial Metal/Gemanium Contacts and Control of Electric Conduction Property at the Interface SDM2014-165 |
Osamu Nakatsuka, Yunsheng Deng, Akihiro Suzuki, Mitsuo Sakashita, Noriyuki Taoka, Shigeaki Zaima (Nagoya Univ.) |
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12:05-13:05 |
Lunch Break ( 60 min. ) |
(5) |
13:05-13:35 |
[Invited Talk]
Area dependence of thermal stability factor in perpendicular STT-MRAM analized by bi-directional data flipping model SDM2014-166 |
Koji Tsunoda, Masaki Aoki, Hideyuki Noshiro, Yoshihisa Iba, Chikako Yoshida, Yuuichi Yamazaki, Atsushi Takahashi, Akiyoshi Hatada, Masaaki Nakabayashi, Toshihiro Sugii (LEAP) |
(6) |
13:35-14:05 |
[Invited Talk]
CNT Via Integration with Highly Dense and Selective CNT Growth SDM2014-167 |
Atsunobu Isobayashi, Makoto Wada, Ban Ito, Tatsuro Saito, Daisuke Nishide, T. Ishikura, Masayuki Katagiri, Yuichi Yamazaki, Takashi Matsumoto, Masayuki Kitamura, Masahito Watanabe, Naoshi Sakuma, Akihiro Kajita, Tadashi Sakai (LEAP) |
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14:05-14:25 |
Break ( 20 min. ) |
(7) |
14:25-14:55 |
[Invited Talk]
Intercalated multi-layer graphene interconnects with low resistivity |
Daiyu Kondo (AIST/Fujitsu Labs.), Haruhisa Nakano, Bo Zhou, Akiko I (AIST), Kenjiro Hayashi (AIST/Fujitsu Labs.), Makoto Takahashi (AIST), Shintaro Sato, Naoki Yokoyama (AIST/Fujitsu Labs.) |
(8) |
14:55-15:25 |
[Invited Talk]
Effect of microtexture in electroplated copper thin-film interconnections on their migration resistance SDM2014-168 |
Ken Suzuki, Takery Kato, Hideo Miura (Tohoku Univ) |
(9) |
15:25-15:55 |
[Invited Talk]
Sub-nanoscale Structure and Barrier Performance of CVD-Cu(Mn)/ALD-Co(W) Interconnect System Proved Using 3D Atom Probe SDM2014-169 |
Kohei Shima (The Univ. of Tokyo), Yuan Tu, Bin Han, Hisashi Takamizawa (Tohoku Univ.), Hideharu Shimizu (The Univ. of Tokyo), Yasuo Shimizu (Tohoku Univ.), Takeshi Momose (The Univ. of Tokyo), Koji Inoue, Yasuyoshi Nagai (Tohoku Univ.), Yukihiro Shimogaki (The Univ. of Tokyo) |
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15:55-16:00 |
Closing Address ( 5 min. ) |
Announcement for Speakers |
Invited Talk | Each speech will have 25 minutes for presentation and 5 minutes for discussion. |
Contact Address and Latest Schedule Information |
SDM |
Technical Committee on Silicon Device and Materials (SDM) [Latest Schedule]
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Contact Address |
Rihito Kuroda(Tohoku Univ.)
Tel 022-795-4833 Fax 022-795-4834
E-: fffe |
Last modified: 2015-01-21 23:42:50
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