IEICE Technical Report

Online edition: ISSN 2432-6380

Volume 122, Number 377

Silicon Device and Materials

Workshop Date : 2023-02-07 / Issue Date : 2023-01-31

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Table of contents

SDM2022-85
[Invited Talk] Metal-induced line width variability challenge and mitigation strategy in advanced post-Cu interconnects
Koichi Motoyama (IBM)
pp. 1 - 4

SDM2022-86
[Invited Talk] Atomic Layer and Conformal Etching Technologies of 3D Structures in Advanced Logic and Memory Devices
Hiroto Ohtake (Hitachi High-Tech Corp.)
pp. 5 - 8

SDM2022-87
[Invited Talk] Advanced process technologies for continuous logic scaling towards 2nm node and beyond
Tomonari Yamamoto (TEL)
pp. 9 - 12

SDM2022-88
[Invited Talk] Pixel Pitch Hybrid Bonding and Three Layer Stacking Technology for BSI
Kazumasa Tanida, Shigeru Suzuki, Toshiki Seo, Yasunori Morinaga, Hayato Korogi, Michinari Tetani, Masakazu Hamada, Ryuji Eto, Takeshi Yamashita, Yasuhiro Kato, Naoaki Sato, Tadami Shimizu, Tetsuro Hanawa, Hiroko Kubo, Fumitaka Ito, Yoshihiro Noguchi, Masayuki Nakamura, Ryuji Mizukoshi, Masahiko Takeuchi, Masakatsu Suzuki, Naoto Niisoe, Isao Miyanaga, Atsushi Ikeda, Susumu Matsumoto (TPSCo)
pp. 13 - 16

SDM2022-89
[Invited Talk] Applications of the surface activated bonding on heterogeneous Integration at room temperature
Tadatomo Suga (Meisei Univ.)
pp. 17 - 22

SDM2022-90
[Invited Talk] New Approach for Epoxy Mold Compound Slurry in Advanced Packaging Technology
Shogo Arata, Chiaki Noda, Yasuhiro Ichige, Satoyuki Nomura (Resonac), Trianggono Widodo, Nagatoshi Tsunoda, Xavier Brun (Intel)
pp. 23 - 26

SDM2022-91
[Invited Talk] Temperature Dependence of Information Processing Performance of Ionic Liquid Type Intelligent Connection Device
Masakazu Kobayashi (NAGASE), Hisashi Shima, Yasuhisa Naitoh, Hiroyuki Akinaga (AIST), Dan Sato, Takuma Matsuo, Masaharu Yonezawa, Kentaro Kinoshita (TUS), Toshiyuki Itoh (Toyota Phys. & Chem. Res. Inst.), Toshiki Nokami (Tottori Univ), Yasumitsu Orii (NAGASE)
pp. 27 - 32

SDM2022-92
[Invited Talk] Next-generation wearable electronics: Skin electronics
Sunghoon Lee, Tomoyuki Yokota, Takao Someya (Univ. of Tokyo)
pp. 33 - 36

Note: Each article is a technical report without peer review, and its polished version will be published elsewhere.

The Institute of Electronics, Information and Communication Engineers (IEICE), Japan