Summary

International Symposium on Antennas and Propagation

2014

Session Number:TH4B

Session:

Number:TH4B_03

Broadband Characterization of Planar Transmission Line Substrate Permittivity up to 67 GHz

Patrick Seiler,  Bernhard Klein,  Dirk Plettemeier,  

pp.-

Publication Date:2014/12/2

Online ISSN:2188-5079

DOI:10.34385/proc.36.TH4B_03

PDF download (173.9KB)

Summary:
In this paper, it is shown how different planar transmission lines (TL) such as microstrip (MS), coplanar waveguide (CPW) and grounded CPW (GCPW) can be used to characterize substrate permittivity using on-wafer probes and a thru-reflect-line (TRL) calibration. From measured S-Parameters, the effective permittivity εr,eff can be extracted and fast and precisely mapped to the physical value εr of the TL’s substrate using simulations. The results up to 67 GHz for the aforementioned TL on a conventional RF substrate are presented and show very good agreement with each other as well as data supplied by the substrate manufacturer.