Summary
International Symposium on Nonlinear Theory and Its Applications
2015
Session Number:B4L-F
Session:
Number:B4L-F-5
Development of Multi-Probe Atomic Force Microscope and Probe Interaction
Nobuo Satoh,
pp.752-755
Publication Date:2015/12/1
Online ISSN:2188-5079
Summary:
We developed a multi-probe atomic force microscopy (MP-AFM) systems using piezoelectric cantilevers and piezoresistive ones. The use of self-sensing cantilevers with deflection sensors as probes markedly reduced complexity in the MP-AFM setup. Simultaneous observation images can be acquired by the MP-AFM under frequency modulation (FM) detection operations. The minimum distance between these probes was 6.9 $ﾂmu$m when it used the piezoresistive cantilevers. We found that the nanoscale interaction between the probes was detected by determining the change in the amplitude of each cantilever. It was clarified that the interaction effect depended on the vibration amplitude of the cantilever-probe.