Summary

International Technical Conference on Circuits/Systems, Computers and Communications

2016

Session Number:M3-2

Session:

Number:M3-2-4

Moisture-Insensitive Low-Concentration Oxidizing-Gas Sensor

Taku Horiguchi,  Yoshiki Sasaki,  Katsutoshi Saeki ,  

pp.303-306

Publication Date:2016/7/10

Online ISSN:2188-5079

DOI:10.34385/proc.61.M3-2-4

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Summary:
We propose a new sensor which is comb-shaped electrode on a Si substrate for moistureproof. We suggest a new measurement method for gas distinguish between NO2 and SO2 at low concentrations. We showed that the low concentration oxidizing gas sensor using a Si substrate has moistureproof within 60% and 80%. Furthermore, it is possible to distinguish from the difference between the change in the pattern of the complex impedance of NO2 and SO2 by using complex impedance method.