| Presentation | 2015-01-22 Growth of hexagonal boron nitride films by CVD for the application of deep ultraviolet light emitters Atsushi MASUDA, Naoki UMEHARA, Takaki SHIMIZU, Tetsuya KOUNO, Hiroko KOMINAMI, Yoichiro NAKANISHI, Kazuhiko HARA, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The hexagonal boron nitride (h-BN) thin films were grown on a c-plane sapphire substrate by chemical vapor deposition using BCl_3 and NH_3 as sources at substrate temperatures from 900 to 1400 ℃ under 20 and 10 kPa. X-ray diffraction and cathodoluminescence measurements have showed that the crystalline quality of the h-BN films depend strongly on growth pressure and temperature. The growth of single crystal films and the observation of exitonic emissions around 215 ran were achieved by low pressure CVD. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | hexagonal boron nitride / CVD / thin film / cathodoluminescence |
| Paper # | EID2014-45 |
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| Committee | EID |
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| Conference Date | 2015/1/15(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Electronic Information Displays (EID) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Growth of hexagonal boron nitride films by CVD for the application of deep ultraviolet light emitters |
| Sub Title (in English) | |
| Keyword(1) | hexagonal boron nitride |
| Keyword(2) | CVD |
| Keyword(3) | thin film |
| Keyword(4) | cathodoluminescence |
| 1st Author's Name | Atsushi MASUDA |
| 1st Author's Affiliation | Graduate School of Engineering, Shizuoka University() |
| 2nd Author's Name | Naoki UMEHARA |
| 2nd Author's Affiliation | Graduate School of Engineering, Shizuoka University |
| 3rd Author's Name | Takaki SHIMIZU |
| 3rd Author's Affiliation | Faculty of Engineering, Shizuoka University |
| 4th Author's Name | Tetsuya KOUNO |
| 4th Author's Affiliation | Graduate School of Engineering, Shizuoka University |
| 5th Author's Name | Hiroko KOMINAMI |
| 5th Author's Affiliation | Graduate School of Engineering, Shizuoka University |
| 6th Author's Name | Yoichiro NAKANISHI |
| 6th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 7th Author's Name | Kazuhiko HARA |
| 7th Author's Affiliation | Research Institute of Electronics, Shizuoka University:Graduate School of Science and Technology, Shizuoka University |
| Date | 2015-01-22 |
| Paper # | EID2014-45 |
| Volume (vol) | vol.114 |
| Number (no) | 407 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |