| Presentation | 2015-01-29 Shape estimation of a diffractive optical element with background scattered light Manabu Hakko, Tomohiro Kiire, Daisuke Barada, Toyohiko Yatagai, Yoshio Hayasaki, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Background scattered light should normally be reduced in industrial fabrication processes. However, we demonstrated that background scattered light from a diffractive optical element contains significant structural information about the element. This was revealed by good agreement between the measured scattered light intensity of a sample and a computer simulation of the light intensity from the sample. Signature region where the background scattered light varied sensitively to the difference of the sample surface shape was determined. The data matching between measurements and computer simulations in this signature region showed that using background scattered light intensity enabled to estimate the surface shape more precisely compared with using the diffraction peak intensity alone. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | scattering / DOE |
| Paper # | PN2014-31,OPE2014-156,LQE2014-143,EST2014-85,MWP2014-53 |
| Date of Issue |
| Conference Information | |
| Committee | EST |
|---|---|
| Conference Date | 2015/1/22(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electronic Simulation Technology (EST) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Shape estimation of a diffractive optical element with background scattered light |
| Sub Title (in English) | |
| Keyword(1) | scattering |
| Keyword(2) | DOE |
| 1st Author's Name | Manabu Hakko |
| 1st Author's Affiliation | Optics Technology Development Center, Corporate R&D Headquarters, Canon Inc.() |
| 2nd Author's Name | Tomohiro Kiire |
| 2nd Author's Affiliation | Center for Optical Research and Education (CORE), Utsunomiya University |
| 3rd Author's Name | Daisuke Barada |
| 3rd Author's Affiliation | Center for Optical Research and Education (CORE), Utsunomiya University |
| 4th Author's Name | Toyohiko Yatagai |
| 4th Author's Affiliation | Center for Optical Research and Education (CORE), Utsunomiya University |
| 5th Author's Name | Yoshio Hayasaki |
| 5th Author's Affiliation | Center for Optical Research and Education (CORE), Utsunomiya University |
| Date | 2015-01-29 |
| Paper # | PN2014-31,OPE2014-156,LQE2014-143,EST2014-85,MWP2014-53 |
| Volume (vol) | vol.114 |
| Number (no) | 433 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |