| Presentation | 2015-01-29 Waveguide depth control of PMMA-PLCs by two-step irradiation in UV direct drawing Akihiro TAKIZAWA, Reiko HORIUCHI, Masanori HANAWA, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Refractive index increase on PMMA (Poly-Methyl Methacrylate) surface produced by ultraviolet light can be used to form planer lightwave circuit (PLC) on the PMMA sample and formulation of curved waveguides and Mach-Zehnder interferometers using a fine intensity mask was reported so far. To increase in degree of freedom of waveguide formulation, the authors have investigated direct drawing of PMMA-PLC using thin UV beams from a Kr-F excimer laser without any intensity masks. In this report, a trial on waveguide depth control of PMMA-PLCs introducing a two-step irradiation process in the direct drawing is reported. Firstly the amount of refractive index increase on PMMA surface by UV light irradiation measured by using an ellipsometer is reported, then the effect of the two-step irradiation process on the waveguide depth is reported. The experimental results show that the waveguide depth is successfully suppressed within 40 μm by the two-step irradiation process. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | PMMA / UV light direct drawing / planar waveguides |
| Paper # | PN2014-28,OPE2014-153,LQE2014-140,EST2014-82,MWP2014-50 |
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| Conference Information | |
| Committee | EST |
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| Conference Date | 2015/1/22(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Electronic Simulation Technology (EST) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Waveguide depth control of PMMA-PLCs by two-step irradiation in UV direct drawing |
| Sub Title (in English) | |
| Keyword(1) | PMMA |
| Keyword(2) | UV light direct drawing |
| Keyword(3) | planar waveguides |
| 1st Author's Name | Akihiro TAKIZAWA |
| 1st Author's Affiliation | University of Yamanashi() |
| 2nd Author's Name | Reiko HORIUCHI |
| 2nd Author's Affiliation | University of Yamanashi |
| 3rd Author's Name | Masanori HANAWA |
| 3rd Author's Affiliation | University of Yamanashi |
| Date | 2015-01-29 |
| Paper # | PN2014-28,OPE2014-153,LQE2014-140,EST2014-82,MWP2014-50 |
| Volume (vol) | vol.114 |
| Number (no) | 433 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |