| Presentation | 2014-12-12 Frequency Dependence of Split C-V Characteristics in Si-face 4H-SiC n-MOSFETs Hiroto YUKI, Hiroshi YANO, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Interface properties in 4H-SiC n-MOSFETs on Si-face were characterized by using split C-V method in the frequency range of 1 - 1M Hz. The split C-V characteristics for SiC-MOSFETs showed frequency dependence due to a large interface state density near the conduction band edge. The impact of the interface properties produced by different oxidation methods including NO- and POCl_3-annealing on the frequency dependence in the split C-V characteristics is discussed in this study. We revealed that a very low frequency is needed for accurate evaluation of channel charge density. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | 4H-SiC / MOS / POCl_3-anneal / Split C-V |
| Paper # | EID2014-33,SDM2014-128 |
| Date of Issue |
| Conference Information | |
| Committee | EID |
|---|---|
| Conference Date | 2014/12/5(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electronic Information Displays (EID) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Frequency Dependence of Split C-V Characteristics in Si-face 4H-SiC n-MOSFETs |
| Sub Title (in English) | |
| Keyword(1) | 4H-SiC |
| Keyword(2) | MOS |
| Keyword(3) | POCl_3-anneal |
| Keyword(4) | Split C-V |
| 1st Author's Name | Hiroto YUKI |
| 1st Author's Affiliation | Nara Institute of Science and Technology() |
| 2nd Author's Name | Hiroshi YANO |
| 2nd Author's Affiliation | University of Tsukuba |
| Date | 2014-12-12 |
| Paper # | EID2014-33,SDM2014-128 |
| Volume (vol) | vol.114 |
| Number (no) | 359 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |