| Presentation | 2014-12-12 Formation of nc-Si in SiOx by Soft X-ray Irradiation Fumito KUSAKABE, Shota HIRANO, Akira HEYA, Naoto MATSUO, Kazuhiro KANDA, Takayasu MOTIZUKI, Shuji MIYAMOTO, Kazuyuki KOHAMA, Kazuhiro ITO, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The low-temperature formation of nanocrystalline Si (nc-Si) in SiO_x is one of key technologies for the realization of high-quality solar cells. We proposed a low-temperature crystallization method by soft X-ray at BL07A in the synchrotron radiation facility, NewSUBARU. It is known that the crystallization temperature of amorphous Si (a-Si) film on SiO_2 substrate was reduced by about 100℃. The a-Si in SiO_x film was crystallized by atomic migration via electron excitation by soft X-ray irradiation at the photon energy near the core level of Si2p. The size of nc-Si prepared at 660℃ by soft X-ray irradiation was estimated to 16.8 nm from the peak position of Raman spectra. The nc-Si can be formed by soft X-ray irradiation at low temperature. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Soft X-ray / nc-Si / Low-temperature crystallization / Raman scattering |
| Paper # | EID2014-32,SDM2014-127 |
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| Conference Information | |
| Committee | EID |
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| Conference Date | 2014/12/5(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Electronic Information Displays (EID) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Formation of nc-Si in SiOx by Soft X-ray Irradiation |
| Sub Title (in English) | |
| Keyword(1) | Soft X-ray |
| Keyword(2) | nc-Si |
| Keyword(3) | Low-temperature crystallization |
| Keyword(4) | Raman scattering |
| 1st Author's Name | Fumito KUSAKABE |
| 1st Author's Affiliation | University of Hyogo() |
| 2nd Author's Name | Shota HIRANO |
| 2nd Author's Affiliation | University of Hyogo |
| 3rd Author's Name | Akira HEYA |
| 3rd Author's Affiliation | University of Hyogo |
| 4th Author's Name | Naoto MATSUO |
| 4th Author's Affiliation | University of Hyogo |
| 5th Author's Name | Kazuhiro KANDA |
| 5th Author's Affiliation | LASTI, University of Hyogo |
| 6th Author's Name | Takayasu MOTIZUKI |
| 6th Author's Affiliation | LASTI, University of Hyogo |
| 7th Author's Name | Shuji MIYAMOTO |
| 7th Author's Affiliation | LASTI, University of Hyogo |
| 8th Author's Name | Kazuyuki KOHAMA |
| 8th Author's Affiliation | Osaka University |
| 9th Author's Name | Kazuhiro ITO |
| 9th Author's Affiliation | Osaka University |
| Date | 2014-12-12 |
| Paper # | EID2014-32,SDM2014-127 |
| Volume (vol) | vol.114 |
| Number (no) | 359 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |