| Presentation | 2014-12-12 Porous Silicon 3D micro structure formation by strain-induced self-rolling by porosity control Keita ISHIGURO, Masaki DENOKAMI, Kanna AOKI, Minoru FUJII, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Silicon (Si) is not only the basis of electronic devices, but also established as a basic material of various devices, especially in the field of Micro-Electro-Mechanical-Systems (MEMS), such as Digital Mirror Device (DMD) built in an image projector, an inkjet printer head, motion sensors of a smartphone, and so on. Compact and highly-functional MEMS devices have been seamlessly realized with the development of Si micromachining technology. However, three-dimensional (3D) processing technique which allows more advanced integration and wide range mobility is not yet established. In this study, we propose a new shaping method of Si into micro circular curvature structures utilizing porosity-controlled porous silicon membrane and steam oxidation. This is a simple, costless, and mass producible new 3D micro processing technique of Si. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Self-rolled-up / Porous silicon tube / Micro-Electro-Mechanical systems (MEMS) / Lab-on-a-chip |
| Paper # | EID2014-31,SDM2014-126 |
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| Conference Information | |
| Committee | EID |
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| Conference Date | 2014/12/5(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Registration To | Electronic Information Displays (EID) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Porous Silicon 3D micro structure formation by strain-induced self-rolling by porosity control |
| Sub Title (in English) | |
| Keyword(1) | Self-rolled-up |
| Keyword(2) | Porous silicon tube |
| Keyword(3) | Micro-Electro-Mechanical systems (MEMS) |
| Keyword(4) | Lab-on-a-chip |
| 1st Author's Name | Keita ISHIGURO |
| 1st Author's Affiliation | Graduate School of Engineering, Kobe University() |
| 2nd Author's Name | Masaki DENOKAMI |
| 2nd Author's Affiliation | Graduate School of Engineering, Kobe University |
| 3rd Author's Name | Kanna AOKI |
| 3rd Author's Affiliation | Graduate School of Engineering, Kobe University |
| 4th Author's Name | Minoru FUJII |
| 4th Author's Affiliation | Graduate School of Engineering, Kobe University |
| Date | 2014-12-12 |
| Paper # | EID2014-31,SDM2014-126 |
| Volume (vol) | vol.114 |
| Number (no) | 359 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |