| Presentation | 2014-12-12 Effect of deposition conditions on the properties of IGZO thin film Katsuya Nishino, Kota Takahashi, Tokiyoshi Matsuda, Mutsumi Kimura, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Dependence of IGZO thin films deposited by RF magnetron sputtering on the condition of targets were evaluated with optical transmittance, sheet resistance and composition ratio. Thin films of IGZO deposited from ceramic IGZO target were more transparent and high resistance than those of deposited from powered target. Characteristics of IGZO thin film are controllable not only Ar and 02 working gas, but also condition of target. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Powder target / Ceramic target / Working gas / Sheet resistance / Optical characteristic / Composition ratio |
| Paper # | EID2014-29,SDM2014-124 |
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| Conference Information | |
| Committee | EID |
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| Conference Date | 2014/12/5(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Electronic Information Displays (EID) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Effect of deposition conditions on the properties of IGZO thin film |
| Sub Title (in English) | |
| Keyword(1) | Powder target |
| Keyword(2) | Ceramic target |
| Keyword(3) | Working gas |
| Keyword(4) | Sheet resistance |
| Keyword(5) | Optical characteristic |
| Keyword(6) | Composition ratio |
| 1st Author's Name | Katsuya Nishino |
| 1st Author's Affiliation | Faculty of Science and Technology, Ryukoku University() |
| 2nd Author's Name | Kota Takahashi |
| 2nd Author's Affiliation | Faculty of Science and Technology, Ryukoku University |
| 3rd Author's Name | Tokiyoshi Matsuda |
| 3rd Author's Affiliation | Faculty of Science and Technology, Ryukoku University |
| 4th Author's Name | Mutsumi Kimura |
| 4th Author's Affiliation | Faculty of Science and Technology, Ryukoku University |
| Date | 2014-12-12 |
| Paper # | EID2014-29,SDM2014-124 |
| Volume (vol) | vol.114 |
| Number (no) | 359 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |