Presentation | 2014-12-12 Crystallization of Germanium Film with (111) Orientation on Amorphous Substrate by Laser Annealing Toru TAKAO, Masahiro HORITA, Yasuaki ISHIKAWA, Yukiharu URAOKA, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Single-grain Germanium (Ge) on amorphous substrate is required to realize the flexible system on panel display. Stripe-patterned Ge films were fabricated on SiO_2 with Si seed and crystallized by green laser annealing. Ge films were evaluated by electron backscatter diffraction (EBSD). The results indicated that Ge films were crystallized with (111) orientation when the fluence was 675 mJ/cm^2 and the scan speed was 150 μm/s. hi addition, crystallinity dependence on laser fluence and width of Ge stripes was examined. The results indicated that crystallization with (111) orientation can be realized at a low fluence when the width of stripes is reduced. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Germanium / Laser annealing |
Paper # | EID2014-26,SDM2014-121 |
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Committee | EID |
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Conference Date | 2014/12/5(1days) |
Place (in Japanese) | (See Japanese page) |
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Registration To | Electronic Information Displays (EID) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Crystallization of Germanium Film with (111) Orientation on Amorphous Substrate by Laser Annealing |
Sub Title (in English) | |
Keyword(1) | Germanium |
Keyword(2) | Laser annealing |
1st Author's Name | Toru TAKAO |
1st Author's Affiliation | Nara Institute of Science and Technology() |
2nd Author's Name | Masahiro HORITA |
2nd Author's Affiliation | Nara Institute of Science and Technology |
3rd Author's Name | Yasuaki ISHIKAWA |
3rd Author's Affiliation | Nara Institute of Science and Technology |
4th Author's Name | Yukiharu URAOKA |
4th Author's Affiliation | Nara Institute of Science and Technology |
Date | 2014-12-12 |
Paper # | EID2014-26,SDM2014-121 |
Volume (vol) | vol.114 |
Number (no) | 359 |
Page | pp.pp.- |
#Pages | 5 |
Date of Issue |