| Presentation | 2014-12-12 Irradiation Effect of Carbon-Based Polyatomic Ions on Si Substrate Mitsuaki TAKEUCHI, Kyouhei HAYASHI, Hiromichi RYUTO, Gikan TAKAOKA, Tsutomu NAGAYAMA, Koji MATSUDA, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Irradiation damage on Si(100) substrates which were irradiated with C_nH^+_n(n=3, 7, 14) and C_nH^+_<2n+1>(n=3,6,12) under conditions of 0.4 - 3.0 keV/carbon and 1×10^<14> carbons/cm^2were evaluated by using Rutherford back scattering with channeling (RBS/C) and spectroscopic ellipsometry (SE). Number of displaced atoms on Si lattice of C_nH^+_<2n+1> estimated by the RBS/C was 40% greater than that of C_nH^+_n at similar energy, which agreed with the SE's data. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | hydrocarbon / ion implantation / annealing / Rutherford backscattering / spectra ellipsometry |
| Paper # | EID2014-17,SDM2014-112 |
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| Conference Information | |
| Committee | EID |
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| Conference Date | 2014/12/5(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electronic Information Displays (EID) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Irradiation Effect of Carbon-Based Polyatomic Ions on Si Substrate |
| Sub Title (in English) | |
| Keyword(1) | hydrocarbon |
| Keyword(2) | ion implantation |
| Keyword(3) | annealing |
| Keyword(4) | Rutherford backscattering |
| Keyword(5) | spectra ellipsometry |
| 1st Author's Name | Mitsuaki TAKEUCHI |
| 1st Author's Affiliation | Photonics and Electronics Science and Engineering Center, Kyoto University() |
| 2nd Author's Name | Kyouhei HAYASHI |
| 2nd Author's Affiliation | Photonics and Electronics Science and Engineering Center, Kyoto University |
| 3rd Author's Name | Hiromichi RYUTO |
| 3rd Author's Affiliation | Photonics and Electronics Science and Engineering Center, Kyoto University |
| 4th Author's Name | Gikan TAKAOKA |
| 4th Author's Affiliation | Photonics and Electronics Science and Engineering Center, Kyoto University |
| 5th Author's Name | Tsutomu NAGAYAMA |
| 5th Author's Affiliation | Nissin Ion Equipment Co., Ltd |
| 6th Author's Name | Koji MATSUDA |
| 6th Author's Affiliation | Nissin Ion Equipment Co., Ltd |
| Date | 2014-12-12 |
| Paper # | EID2014-17,SDM2014-112 |
| Volume (vol) | vol.114 |
| Number (no) | 359 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |