Presentation | 2014-11-27 Hardness and Young's Modulus of InN Yasushi OHKUBO, Momoko DEURA, Yuki TOKUMOTO, Kentaro KUTSUKAKE, Yutaka OHNO, Ichiro YONENAGA, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | InN thin films of 0.5-4 μm thickness grown by plasma-assisted MBE method were investigated on the mechanical properties of hardness and Young's modulus by nanoindentation tests at room temperature in terms of the crystalline quality. The hardness and Young's modulus were determined to be 8.2 and 178 GPa, respectively. The values were strongly affected by the crystallinity. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | InN / hardness / Young's modulus / nanoindentation / crystallinity |
Paper # | ED2014-82,CPM2014-139,LQE2014-110 |
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Conference Information | |
Committee | LQE |
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Conference Date | 2014/11/20(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Lasers and Quantum Electronics (LQE) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Hardness and Young's Modulus of InN |
Sub Title (in English) | |
Keyword(1) | InN |
Keyword(2) | hardness |
Keyword(3) | Young's modulus |
Keyword(4) | nanoindentation |
Keyword(5) | crystallinity |
1st Author's Name | Yasushi OHKUBO |
1st Author's Affiliation | Institute for Materials Research, Tohoku University() |
2nd Author's Name | Momoko DEURA |
2nd Author's Affiliation | Institute for Materials Research, Tohoku University |
3rd Author's Name | Yuki TOKUMOTO |
3rd Author's Affiliation | Institute of Industrial Science, University of Tokyo |
4th Author's Name | Kentaro KUTSUKAKE |
4th Author's Affiliation | Institute for Materials Research, Tohoku University |
5th Author's Name | Yutaka OHNO |
5th Author's Affiliation | Institute for Materials Research, Tohoku University |
6th Author's Name | Ichiro YONENAGA |
6th Author's Affiliation | Institute for Materials Research, Tohoku University |
Date | 2014-11-27 |
Paper # | ED2014-82,CPM2014-139,LQE2014-110 |
Volume (vol) | vol.114 |
Number (no) | 338 |
Page | pp.pp.- |
#Pages | 4 |
Date of Issue |