Presentation 2014-11-27
Hardness and Young's Modulus of InN
Yasushi OHKUBO, Momoko DEURA, Yuki TOKUMOTO, Kentaro KUTSUKAKE, Yutaka OHNO, Ichiro YONENAGA,
PDF Download Page PDF download Page Link
Abstract(in Japanese) (See Japanese page)
Abstract(in English) InN thin films of 0.5-4 μm thickness grown by plasma-assisted MBE method were investigated on the mechanical properties of hardness and Young's modulus by nanoindentation tests at room temperature in terms of the crystalline quality. The hardness and Young's modulus were determined to be 8.2 and 178 GPa, respectively. The values were strongly affected by the crystallinity.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) InN / hardness / Young's modulus / nanoindentation / crystallinity
Paper # ED2014-82,CPM2014-139,LQE2014-110
Date of Issue

Conference Information
Committee LQE
Conference Date 2014/11/20(1days)
Place (in Japanese) (See Japanese page)
Place (in English)
Topics (in Japanese) (See Japanese page)
Topics (in English)
Chair
Vice Chair
Secretary
Assistant

Paper Information
Registration To Lasers and Quantum Electronics (LQE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Hardness and Young's Modulus of InN
Sub Title (in English)
Keyword(1) InN
Keyword(2) hardness
Keyword(3) Young's modulus
Keyword(4) nanoindentation
Keyword(5) crystallinity
1st Author's Name Yasushi OHKUBO
1st Author's Affiliation Institute for Materials Research, Tohoku University()
2nd Author's Name Momoko DEURA
2nd Author's Affiliation Institute for Materials Research, Tohoku University
3rd Author's Name Yuki TOKUMOTO
3rd Author's Affiliation Institute of Industrial Science, University of Tokyo
4th Author's Name Kentaro KUTSUKAKE
4th Author's Affiliation Institute for Materials Research, Tohoku University
5th Author's Name Yutaka OHNO
5th Author's Affiliation Institute for Materials Research, Tohoku University
6th Author's Name Ichiro YONENAGA
6th Author's Affiliation Institute for Materials Research, Tohoku University
Date 2014-11-27
Paper # ED2014-82,CPM2014-139,LQE2014-110
Volume (vol) vol.114
Number (no) 338
Page pp.pp.-
#Pages 4
Date of Issue