| Presentation | 2014-11-27 The micro machining process technology of nano imprint and dry etching to improve the efficiency of nitride LED Yukio Kashima, Eriko Matsuura, Satoshi Shimatani, Mitsunori Kokubo, Takaharu Tashiro, Takafumi Ookawa, Ryuichiro Kamimura, Yamato Osada, Sachie Fujikawa, Hideki Hirayama, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We fabricated the photonic crystal in nitride LED and improved the light extraction efficiency. We also introduce the micro machining process integration technology from designing the mold by simulation, patterning of bi-layer resist by nano imprint and forming the photonic crystal by dry etching. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Light extraction efficiency / Photonic crystal / Bi-layer resist / Nano-imprint / Dry etching |
| Paper # | ED2014-79,CPM2014-136,LQE2014-107 |
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| Conference Information | |
| Committee | LQE |
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| Conference Date | 2014/11/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | The micro machining process technology of nano imprint and dry etching to improve the efficiency of nitride LED |
| Sub Title (in English) | |
| Keyword(1) | Light extraction efficiency |
| Keyword(2) | Photonic crystal |
| Keyword(3) | Bi-layer resist |
| Keyword(4) | Nano-imprint |
| Keyword(5) | Dry etching |
| 1st Author's Name | Yukio Kashima |
| 1st Author's Affiliation | MARUBUN CORPORATION() |
| 2nd Author's Name | Eriko Matsuura |
| 2nd Author's Affiliation | MARUBUN CORPORATION |
| 3rd Author's Name | Satoshi Shimatani |
| 3rd Author's Affiliation | TOKYO OHKA KOGYO CO.,LTD. |
| 4th Author's Name | Mitsunori Kokubo |
| 4th Author's Affiliation | TOSHIBA MACHINE CO.,LTD. |
| 5th Author's Name | Takaharu Tashiro |
| 5th Author's Affiliation | TOSHIBA MACHINE CO.,LTD. |
| 6th Author's Name | Takafumi Ookawa |
| 6th Author's Affiliation | TOSHIBA MACHINE CO.,LTD. |
| 7th Author's Name | Ryuichiro Kamimura |
| 7th Author's Affiliation | ULVAC,Inc. |
| 8th Author's Name | Yamato Osada |
| 8th Author's Affiliation | ULVAC,Inc. |
| 9th Author's Name | Sachie Fujikawa |
| 9th Author's Affiliation | RIKEN |
| 10th Author's Name | Hideki Hirayama |
| 10th Author's Affiliation | RIKEN |
| Date | 2014-11-27 |
| Paper # | ED2014-79,CPM2014-136,LQE2014-107 |
| Volume (vol) | vol.114 |
| Number (no) | 338 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |