| Presentation | 2014-11-25 Study on PZT thin films for ultra-high density ferroelectric data storage based on scanning nonlinear dielectric microscopy Yitong CHEN, Yoshiomi HIRANAGA, Yasuo CHO, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Lead zirconate titanate ( Pb(Zr,Ti)O_3:PZT) thin film is one of the promising candidate ferroelectrics for the next generation high density ferroelectric data storage based on scanning nonlinear dielectric microscopy(SNDM). Its very large nonlinear dielectric constants enables us to achieve high speed reading. To use this advantage, high quality PZT thin film with high polarization switching speed of very small nano-domain dots is required. In this paper, we describe the fabrication method for high quality PZT film using Radio-frequency magnetron sputtering equipment. We investigated the quality of the films as functions of the amount of Pb and the thickness of film. The properties of these films are measured and discussed. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | ferroelectric data record / PZT film / scanning nonlinear dielectric microscopy |
| Paper # | MR2014-26 |
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| Conference Information | |
| Committee | MR |
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| Conference Date | 2014/11/18(1days) |
| Place (in Japanese) | (See Japanese page) |
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| Topics (in Japanese) | (See Japanese page) |
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| Registration To | Magnetic Recording (MR) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Study on PZT thin films for ultra-high density ferroelectric data storage based on scanning nonlinear dielectric microscopy |
| Sub Title (in English) | |
| Keyword(1) | ferroelectric data record |
| Keyword(2) | PZT film |
| Keyword(3) | scanning nonlinear dielectric microscopy |
| 1st Author's Name | Yitong CHEN |
| 1st Author's Affiliation | Research Institute of Electrical Communication, Tohoku University() |
| 2nd Author's Name | Yoshiomi HIRANAGA |
| 2nd Author's Affiliation | Research Institute of Electrical Communication, Tohoku University |
| 3rd Author's Name | Yasuo CHO |
| 3rd Author's Affiliation | Research Institute of Electrical Communication, Tohoku University |
| Date | 2014-11-25 |
| Paper # | MR2014-26 |
| Volume (vol) | vol.114 |
| Number (no) | 327 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |