| Presentation | 2014-11-28 Fabrication of single crystalline p-i-n nanocolumns array on a sputter-deposited thin film Tomohiro NOMA, Hiroaki HAYASHI, Daishi FUKUSHIMA, Yuta KONNO, Ichirou NOMURA, Katsumi KISHINO, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Nitride has an attractive feature of bandgap engineering from ultraviolet to infrared. However, a lot of defects in nitride inhibit the feature. In this study, we demonstrated nitride nanocolumn on Si wafer that is expected realization of large-scale/low-cost devices. Furthermore, nanocolumn structure is expected to suppress propagation of dislocation. We employed a sputter-deposited AlN nucleation layer, because it is so difficult to grow nitride crystal on Si wafer. We successfully fabricated a single crystalline GaN nanocolumns array even on the sputter-deposited film containing high-density dislocations. Single-peak PL emission in wide visible range from integrated InGaN/GaN MQW, and control of PL peak wavelength by pre-patterning were also demonstrated. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Nanocolumn / Si wafer / Sputter-deposited AlN |
| Paper # | ED2014-97,CPM2014-154,LQE2014-125 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2014/11/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of single crystalline p-i-n nanocolumns array on a sputter-deposited thin film |
| Sub Title (in English) | |
| Keyword(1) | Nanocolumn |
| Keyword(2) | Si wafer |
| Keyword(3) | Sputter-deposited AlN |
| 1st Author's Name | Tomohiro NOMA |
| 1st Author's Affiliation | Sophia university() |
| 2nd Author's Name | Hiroaki HAYASHI |
| 2nd Author's Affiliation | Sophia university |
| 3rd Author's Name | Daishi FUKUSHIMA |
| 3rd Author's Affiliation | Sophia university |
| 4th Author's Name | Yuta KONNO |
| 4th Author's Affiliation | Sophia university |
| 5th Author's Name | Ichirou NOMURA |
| 5th Author's Affiliation | Sophia university |
| 6th Author's Name | Katsumi KISHINO |
| 6th Author's Affiliation | Sophia university |
| Date | 2014-11-28 |
| Paper # | ED2014-97,CPM2014-154,LQE2014-125 |
| Volume (vol) | vol.114 |
| Number (no) | 336 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |