| Presentation | 2014-11-28 Effects of thermal cleaning on surface of bulk GaN substrates S. OKADA, H. MIYAKE, K. HIRAMATSU, R. MIYAGAWA, O. ERYU, T. HASHIZUME, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Thermal cleaning at high temperature from 800℃ to 1100℃ of free-standing polar (0001) plane and non-polar (10-10) (20-21) (20-2-1) plane GaN substrates was demonstrated, and the change of surface morphologies were shown. In the case of polar (0001) plane, polishing scratches on the surface decreased with increased thermal cleaning temperature, and atomic step was appeared at 1000℃. At 1100℃, desorption of surface occurred and surface morphologies became rough. In the case of non-polar GaN substrates, surface morphologies after thermal cleaning were markedly different based on orientation of surface. Surface roughness of (20-21) plane GaN drastically deteriorated with increasing thermal cleaning temperature. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | GaN / thermal cleaning / free-standing substrate |
| Paper # | ED2014-96,CPM2014-153,LQE2014-124 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2014/11/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Effects of thermal cleaning on surface of bulk GaN substrates |
| Sub Title (in English) | |
| Keyword(1) | GaN |
| Keyword(2) | thermal cleaning |
| Keyword(3) | free-standing substrate |
| 1st Author's Name | S. OKADA |
| 1st Author's Affiliation | Mie University() |
| 2nd Author's Name | H. MIYAKE |
| 2nd Author's Affiliation | Mie University |
| 3rd Author's Name | K. HIRAMATSU |
| 3rd Author's Affiliation | Mie University |
| 4th Author's Name | R. MIYAGAWA |
| 4th Author's Affiliation | Nagoya Institute of Technology |
| 5th Author's Name | O. ERYU |
| 5th Author's Affiliation | Nagoya Institute of Technology |
| 6th Author's Name | T. HASHIZUME |
| 6th Author's Affiliation | Hokkaido University |
| Date | 2014-11-28 |
| Paper # | ED2014-96,CPM2014-153,LQE2014-124 |
| Volume (vol) | vol.114 |
| Number (no) | 336 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |