| Presentation | 2014-11-28 Mapping of thermal degradation of Au/Ni/n-GaN Schottky diodes using scanning internal photoemission microscopy Kenji SHIOJIMA, Shingo YAMAMOTO, Yuhei KIHARA, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have developed a new mapping technique, scanning internal-photoemission microscopy, to characterize the electrical inhomogeneity of metal-semiconductor interfaces. We characterized the initial stage of thermal degradation of Au/Ni/n-GaN Schottky contacts. We found that, upon 400℃ annealing, a partial thermal degradation occurred from a scratch on the dot, where Au atoms diffused to the interface and reacted with GaN. It was confirmed that this method is a powerful tool to map metal contacts for the investigations of partial thermal degradation, formation of parallel contacts, and inhomogeneity of surface chemistry. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Schottky contacts / Scanning internal photoemission microscopy / GaN / Thermal degradation |
| Paper # | ED2014-91,CPM2014-148,LQE2014-119 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2014/11/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Mapping of thermal degradation of Au/Ni/n-GaN Schottky diodes using scanning internal photoemission microscopy |
| Sub Title (in English) | |
| Keyword(1) | Schottky contacts |
| Keyword(2) | Scanning internal photoemission microscopy |
| Keyword(3) | GaN |
| Keyword(4) | Thermal degradation |
| 1st Author's Name | Kenji SHIOJIMA |
| 1st Author's Affiliation | Graduate School of Electrical and Electronics Engineering University of Fukui() |
| 2nd Author's Name | Shingo YAMAMOTO |
| 2nd Author's Affiliation | Graduate School of Electrical and Electronics Engineering University of Fukui |
| 3rd Author's Name | Yuhei KIHARA |
| 3rd Author's Affiliation | Graduate School of Electrical and Electronics Engineering University of Fukui |
| Date | 2014-11-28 |
| Paper # | ED2014-91,CPM2014-148,LQE2014-119 |
| Volume (vol) | vol.114 |
| Number (no) | 336 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |