Presentation | 2014-11-28 Mapping of thermal degradation of Au/Ni/n-GaN Schottky diodes using scanning internal photoemission microscopy Kenji SHIOJIMA, Shingo YAMAMOTO, Yuhei KIHARA, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We have developed a new mapping technique, scanning internal-photoemission microscopy, to characterize the electrical inhomogeneity of metal-semiconductor interfaces. We characterized the initial stage of thermal degradation of Au/Ni/n-GaN Schottky contacts. We found that, upon 400℃ annealing, a partial thermal degradation occurred from a scratch on the dot, where Au atoms diffused to the interface and reacted with GaN. It was confirmed that this method is a powerful tool to map metal contacts for the investigations of partial thermal degradation, formation of parallel contacts, and inhomogeneity of surface chemistry. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Schottky contacts / Scanning internal photoemission microscopy / GaN / Thermal degradation |
Paper # | ED2014-91,CPM2014-148,LQE2014-119 |
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Committee | ED |
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Conference Date | 2014/11/20(1days) |
Place (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Electron Devices (ED) |
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Language | ENG |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Mapping of thermal degradation of Au/Ni/n-GaN Schottky diodes using scanning internal photoemission microscopy |
Sub Title (in English) | |
Keyword(1) | Schottky contacts |
Keyword(2) | Scanning internal photoemission microscopy |
Keyword(3) | GaN |
Keyword(4) | Thermal degradation |
1st Author's Name | Kenji SHIOJIMA |
1st Author's Affiliation | Graduate School of Electrical and Electronics Engineering University of Fukui() |
2nd Author's Name | Shingo YAMAMOTO |
2nd Author's Affiliation | Graduate School of Electrical and Electronics Engineering University of Fukui |
3rd Author's Name | Yuhei KIHARA |
3rd Author's Affiliation | Graduate School of Electrical and Electronics Engineering University of Fukui |
Date | 2014-11-28 |
Paper # | ED2014-91,CPM2014-148,LQE2014-119 |
Volume (vol) | vol.114 |
Number (no) | 336 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |